E-755

® Zero-Voltage Control ModePromotes Extreme Actuator Lifetime

Digital Controller for NEXLINE Nanopositioning Linear Drives

NEXLINE
Ordering Information E-755.1A1 Linearization
Digital Controller for Closed-LoopNEXLINE ® Nanopositioning LinearDrives with Incremental encoder E-755-controlled nanoposi-tioning systems provide out-standing linearity, achieved by digital polynomial lineariza- tion. The linearization can improve linearity to 0.001% over the full travel range.The products described in thisdatasheet are in part protected by the following patents: US- patent No. 6,800,984 German patent No. 10148267
E-755.101 Digital Controller for Open-LoopNEXLINE ® Nanopositioning LinearDrives E-755 digital NEXLINE ® controller with N-214 nanopositioner, 20 mm travel range. ® nanopositioning ac-tuators can often be found in inaccessible locations deep inside complex equipment,where nanometer-precise alignment and vibration can- cellation are required. This makes the long lifetime of NEXLINE Special Control Algorithms for NEXLINE
® NanopositioningLinear Drives 32-Bit Digital Filters 24-Bit DAC Resolution Fully Programmable Low-Pass and Notch Filters Non-Volatile User Settings and Last-Position Data
® drives especiallyadvantageous. The E-755 firm- ware incorporates a special procedure to bring the NEX-LINE PI General Command Set Compatible
® actuator to a full-hold-ing-force zero-drive-voltage condition, no matter where it is along its travel range. Thiseliminates long-term offsetvoltages, which can limit the lifetime of conventional piezo drives. E-755 digital nanopositioningcontrollers are designed to drive the novel, patented, NEXLINE
® nanopositioning lin-ear
® to break through thebarriers of conventional nano- positioning actuators.The E-755 offers two differentcontrol modes: a high-resolu-tion, high dynamics direct piezo mode, with basically un- limited resolution, and a long- range mode with theoretically unlimited travel range. drives. Combining ad-vanced control technology and sensor signal processing with special drive algorithms, the E-755 can provide preci- sion motion control over hun-dreds of millimeters with pico-meter-range resolution. Coordinated action of shear-ing and clamping piezo ele- ments is what allows NEX- LINE High-Resolution Closed-LoopControl E-755 controllers are based onpowerful 32-bit DSPs and come in open- and closed-loop versions. Both versionsfeature four high-resolution (24-bit) linear amplifiers with an output range of ±250 V required to control a single- axis NEXLINE
Application Examples

Semiconductor manufacturing Quality control in the semiconductor industry Astronomical telescopes Truss structures Active vibration control Alignment in high mag-netic fields, as in particlephysics, atomic fusion and superconductivity research

® drive. For theclosed-loop models, high-res-olution incremental positionsensors are supported by spe- cial excitation and read-out electronics. The sensors sup-ported may provide better than nanometer resolution. A power-down routine in the E-755 firmware saves the cur-rent position, allowing a closed-loop system to be ready for use without refer- encing next time it is powered up.
5 nm steps performed by a system consisting of the N-214 NEXLINE ® nanopositionerand the E-755.1A1 controller, measured by a Zygo ZMI 2000 interferometer. Note the excellent system response to consecutive 5 nm step commands. In this case the closed-loop resolution is limited by the linear encoder in the N-214 (5 nm / incre- ment); the E-755 can work with linear encoders with sub-nanometer resolution. © PI 1998-2006.Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at www.pi.ws. 06/05/23.0 6 a - 6