Piezo

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Nano

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Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions
Step response of the P-733.ZCD. Settling time <8 msec for a 10 µm step Motion controllers

Technical Data

Ceramic Linear motors & Stages P-733.ZCD UnitsTolerance P-733.ZCL Index Active axesZ Motion and positioning Integrated sensorCapacitive Open-loop travel, -20 to +120 V120µmmin. Closed-loop travel 100µm Open-loop resolution0.2nmtypicalClosed-loop resolution0.3nmtypical Linearity0.03%typical Repeatability<2nmtypical Pitch<5µradtypicalYaw<5µradtypical Mechanical properties Stiffness in motion direction2.5N/µm±20% Unloaded resonant frequency700Hz±20%Resonant frequency @ 120 g530Hz±20% Resonant frequency @ 200 g415Hz±20%Load20NMax. Drive properties Ceramic typePICMA
® Electrical capacitance6µF±20%Dynamic operating current coefficient7.5µA/(Hz x µm)±20% Miscellaneous Operating temperature range-20 bis 80°C MaterialAl Mass580g±5% Cable length1.5m±10 mmSensor connectionSub-D mix (CD-version)2x LEMO (CL-version) Voltage connectionSub-D mix (CD-version) 1x LEMO (CL-version)Recommended controller/amplifierH, F, L

2a-10 2-1 to 2-86 see the Hardbound Catalog