P-733.Z
Large Variety of Models for aBroad Range of Applications
® multilayerpiezo actuators. PICMA
Ordering Information For scanning and positioningtasks in XY, the P-733.2CD and .3CD versions are available
with a travel range of 100 x 100
µm. For high-dynamics appli-
cations, the P-733.2DD and
.3DD models can be offeredwith direct drive and reducedtravel range.For ultra-high-vacuum applica-tions down to 10
® actua-tors are the only actuators on
the market with ceramic-only
insulation, which makes them
resistant to ambient humidity
and leakage-current failures.
They are thus far superior to
conventional actuators in relia-bility and lifetime.
P-733.ZCD Z-Piezo Nanopositioning / ScanningStage, 100 µm, Capacitive Sensor, Sub-D Connector P-733.ZCL Z-Piezo Nanopositioning / Scanning
Stage, 100 µm, Capacitive Sensor,
LEMO Connector Superior Lifetime Highest possible reliability isassured by the use of award-
winning PICMA
P-733.ZCD vertical piezo stage Travel Range 100 µm Fast: <8 ms Settling Time, 700 Hz Resonant Frequency Direct Metrology with
Capacitive sensors Closed-loop Resolution to 0.3 nm 50 x 50 mm Clear Aperture XY and XYZ Versions also Available Vacuum-Compatible Versions Available
-9 hPa, nano-
positioning systems as well as
comprehensive accessories,
such as suitable feedthroughs,are available. P-733.Z piezo Z-stages offer a positioning and scanningrange of 100 µm with sub-nanometer resolution. The fast response and large clear
aperture are ideal for applica-
tions such as fast focusing,
scanning or 3D
microscopy.The settling time of the P-733.Z is in the 10 ms range. Capacitive Sensors for Highest Accuracy Capacitive sensors measureposition directly and without
physical contact. This makes
them free of friction and hys-
teresis, a fact which, in combi-
nation with the positioning res-
olution of well under 1 nm,makes it possible to achieve
very high levels of linearity. A further advantage of directmetrology with capacitive sen-sors is the high phase fidelity
and the high bandwidth of up
to 10 kHz. The resolution of the
P-733.Z is better than 0.3 nm.Capacitive position sensorsmeasure the actual motion ofthe moving part relative to the
stationary base (Direct Metro-
logy). Errors in the drive train,
actuator, lever arm or in guid-
ing system do not influence themeasurements. The result isexceptional motion linearity,
higher long-term stability and a
stiffer, more-responsive control
loop, because external influ-
ences are immediately recog-
nized by the sensor. The capac-itive sensor non-linearity is typ-ically less than 0.03%, the
repeatability of the P-733.Z bet-
ter than 2 nm.
Application Examples Scanning microscopy Confocal microscopy Mask/wafer positioning Surface inspection Nano-imprint Micromanipulation
P-733.Z dimensions in mm © PI 1998-2006.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/09/21.0 2 a-9