Piezo

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Nano

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Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Industrial position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion controllers Ceramic Linear motors & Stages Index
Dimensions of the P-612.Z in mm.

Technical Data

ModelsP-612.ZSLP-612.Z0LUnitsNotes see p. 2-84 Active axisZZ Min. open-loop travel -20 to 120 V 110110µm A2Closed-loop travel100-µmA5 Integrated feedback sensorSGS - B Closed- / open-loop resolution*2 / 0.2- / 0.2nm C1 Closed-loop linearity (typ.)0.2-% Repeatability10-nm Stiffness0.60.6N/µm D1 Max. normal load+15 / -5+15 / -5ND4 Tilt (
X ,
Y ) (typ.)<20<20µradElectrical capacitance3.03.0µF ±20% F1 Unloaded resonant frequency490490Hz ±20% G2Resonant frequency @ 30 g load420420Hz ±20% Operating temperature range-40 to 120-40 to 150°C H2 Voltage connectionVLVLJ1 Sensor connectionLLJ2 Weight (with cables)280275g ±5%L Body materialAlAl Recommended controller D, HA, G
* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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