P-612.Z

Compact Piezo Elevation Stage with Aperture

Ordering Information P-612.Z0L Vertical Nanopositioning System, 100 µm, 20 x 20 mm Aperture, Open-Loop P-612.ZSL Vertical Nanopositioning System, 100 µm, 20 x 20 mm Aperture, SGS Sensors XY Multi-Axis Versions P-612 piezo nanopositionersare also available as XY scan- ners (see page 2-58) using the same form factor as the Z-ver-sions.
® mul-tilayer piezo actuators, which are integrated into a sophisti- cated, single-module, flexure guiding system. PICMA
Compact P-612.ZSL nano-elevation stage with a 20 mm x 20 mm clear aperture. ® actua-tors are the only actuators on the market with ceramic-only insulation, making them farsuperior to conventional actua-tors in lifetime and perform- ance. The FEA-modeled flex- ures are wire-EDM-cut for superior guiding precision. Inaddition they are maintenance- free and not subject to wear. Small Footprint: 60 x 60 mm 100 µm Travel Range Resolution to 0.2 nm For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA
® High-Performance Piezo Actuators Open-Loop and Closed-LoopVersions These elevation stages arecost-effective, compact, piezo- based positioning systems with travel ranges of 100 µm. The space-saving design fea-tures a footprint of only 60 x 60 mm. The 20 x 20 mm clear aperture makes them ide- ally suited for sample position- ing in microscopy. Thanks to PICMA Open- and closed-loop modelsare available to suit your appli- cation. The closed-loop ver- sions are equipped with high-resolution, strain gauge sen-sors mounted on the flexure guiding system for optimum position stability and respon- siveness. The sensors are operated in a full bridge circuit and provide position informa-tion with nanometer resolutionto the servo-controller.The open-loop models areideal for applications where fast response and very highresolution are essential, butabsolute positioning is unim- portant. They can also be used when the position is controlledby another source, such as an external position sensor or aCCD-chip connected to animage processing system.
Settling takes less than 10 ms over the entire travel range in closed-loop. ® piezo actuator drivesand frictionless flexure guid- ance, they provide response times of a few milliseconds and resolutions in the nanome-ter range.
Application Examples

Interferometry Microscopy Nanopositioning Biotechnology

P-612 are available as XY-scanners (P-612.2SL, on the left) and vertical stages (P-612.ZSL, on the right) providing a travel range of 100 µm per axis.

Quality assurance

Semiconductor technology

2006 PI News Catalog: Precision Nanopositioning, Piezo Z-Stage, Flexure Actuator, Ultra-Precision Motion control, Translation stage,

2 a - 5

, XY-Table, Piezoelectric actuator, Piezomotor, Ulrasonic Motors, n Control, Translation Stage, XY-Table, Piezoelectric Actuator, Piezomotor, Ulrasonic Motors, Piezo Z-Stage,