Catalogues - the-world-of-nanopositioning-and-micropositioning

Catalogue The World of Nanopositioning and Micropositioning

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Piezo • Nano • Positioning

Active Optics / Steering Mirrors

Tutorial: Piezo-electrics in Positioning

Piezo Drivers & Nano-positioning Controllers

Hexapods/ Micropositioning

Photonics Alignment Solutions

Ceramic Linear motors & Stages

Index

P-601 dimensions in mm.


Technical Data
Models	P-601.10	P-601.1S	P-601.30	P-601.3S	P-601.40	P-601.4S	Units	Tolerances
Active Axis	ZZZZZZ
Motion and Positioning
Integrated sensor	-	SGS	-	SGS	-	SGS
Travel range -20 to +120 V, open-loop	110	110	300	300	480	480	urn	min.
Travel range closed-loop	-	100	-	250	-	400	urn
Resolution open-loop	0.2	0.2	0.3	0.3	0.4	0.4	nm	typ.
Resolution closed-loop	2	2	6	6	12	12	nm	typ.
Linearity	-	0.1	-	0.3	-	0.3	%	typ.
Unidirectional repeatability	-	8	-	10	-	30	nm	typ.
Pitch	20	20	20	20	20	20	urad	typ.
Yaw	10	10	10	10	10	10	urad	typ.
Mechanical Properties
Stiffness in motion direction	0.8	0.8	0.38	0.38	0.28	0.28	N/um	±20 %
Resonant frequency unloaded	750	750	440	440	350	350	Hz	±20 %
Resonant frequency loaded (30 g)	620	620	350	350	290	290	Hz	±20 %
Push-/pull force in motion direction	30/10	30/10	20/10	20/10	15/10	15/10	N	Max.
Lateral force	30	30	30	30	30	30	N	Max.
Drive Properties
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance	1.5	1.5	3.1	3.1	4.6	4.6	uF	±20 %
DOOC	1.9	1.9	1.6	1.6	1.4	1.4	uA/(Hz x um) ±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	-20 to 80	-20 to 80	-20 to 80	°C
Material	Stainless	Stainless	Stainless	Stainless	Stainless	Stainless
	Steel	Steel	Steel	Steel	Steel	Steel
Mass	50	50	75	75	110	110	g	±5 %
Cable length	250	250	250	250	250	250	mm	±10 mm
Sensor connection	Open leads	Open leads	Open leads	Open leads	Open leads	Open leads
Voltage connection	Open leads	Open leads	Open leads	Open leads	Open leads	Open leads
Recommended driver/controller	A, G	D, H	A, G	D, H	A, G	D, H

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