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P-601 PiezoMove ® High-Precision Lever Amplified Z-Actuator with Flexure Guiding Ordering Information P-601.1S PiezoMove ® Lever AmplifiedActuator, 100 µm, SGS P-601.3S PiezoMove ® Lever AmplifiedActuator, 250 µm, SGS Superior Lifetime P-601.4S Reliability is assured by the useof award-winning PICMA PiezoMove ® Lever AmplifiedActuator, 400 µm, SGS P-601.10 PiezoMove ® Lever AmplifiedActuator, 110 µm, Open-Loop P-601 PiezoMove ® Lever Amplified Z-Actuators. P-603.30 PiezoMove ® Lever AmplifiedActuator, 300 µm, Open-Loop Flexure Guidance for Frictionless, Ultra-Straight Motion P-601.40 PiezoMove ® Lever AmplifiedActuator, 480 µm, Open-Loop Travel Ranges to 480 µm Resolution to 0.2 nm High Dynamics and Stiffness PICMA ® High-Performance Piezo Actuators Open and Closed-Loop Versions Ideal for OEM Applications Lever amplified PiezoMove ® P-601 actuators combine largevertical travel ranges up to 480 µm and a high positioningaccuracy in a very compact
design. With settling times of
only a view milliseconds and a
resolution in the sub-nanome-
ter range they are well suited
for static and dynamical appli-cations.PiezoMove ® mul-tilayer actuators, which areintegrated into a sophisticated,single-module, flexure guiding
system. The PICMA ® lever amplifiedactuators feature a resolutionto 0.2 nm and a repeatability to8 nm.With their highly precise, fric-tionless flexure guidance, a
very high stiffness and excel-
lent straightness of motion arereached. Together with theirsmall dimensions and the cost-
effective design, the P-601
lever amplified actuators are
especially suited for OEM
applications. Versions withstrain-gauge sensors (SGS) areequipped with a full industrial bridge cir-
cuit that is insensitive to ther-
mal drift. Versions without a
sensor are also available for
open-loop applications. In
addition to standard modelsmade from steel special ver-sions from Invar or aluminum,
as well as non-magnetic onesare available on request. ® actuatorsfeature cofired ceramic encap-sulation and thus offer betterperformance and reliability
than conventional piezo actua-
tors. The wire-EDM-cut flexu-
res are FEA modeled to make
them extremely precise. Inaddition they are maintenance-free and not subject to wear. ® P-601 lever ampli-fied actuators cover the rangebetween direct-driven pre-loaded piezo translators, such
as the P-840 series, and single-
axis nanopositioning stages,
like the P-611 series. Compared
to direct-driven piezo transla-
tors, lever amplified actuatorsoffer larger travel ranges, a
much higher lateral stiff-
ness and guiding precision. Compared to single-axis nano-positioning stages, they offer
clearly smaller dimensions.
PiezoMove Application Example Nanopositioning Semiconductor Testing Adaptronics Photonics / Integrated
Optics Biotechnology © PI 1998-2006.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/04/19.2 2006 PI News Catalog: Precision Nanopositioning, Piezo Z-Stage, Flexure Actuator, Ultra-Precision Motion control, Translation stage, 2 a-3 , XY-Table, Piezoelectric actuator, Piezomotor, Ulrasonic Motors, n Control, Translation Stage, XY-Table, Piezoelectric Actuator, Piezomotor, Ulrasonic Motors, Piezo Z-Stage,
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