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| | | (to be ordered separately) external drive electronics is required which accepts a ±10 V analog signal from the controller. Note The products described in this document are in part protected by the following patents: US-Pat. No. 6,765,335 German Patent No. 10154526 | | |
| | | Objective Scanners & Mirrors Z/Tip/Tilt Stages XY/XYZ Stages 6-Axis Stages | | |
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| | | Piezo Controllers News & Applications | | |
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| | | The M-674 integrated into a Micropositioning Stage | | |
| | | Dimensions of the M-674 RodDrive in mm | | |
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| | | | | | | | | | | | | | Technical Data | | | | Model | M-674.164 | M-674.264 | M-674.364 | Units | Tolerance | | | | Motion and positioning | | | | | | | | | Travel range | 50 | 100 | 150 | mm | x | | | | Minimum incremental motion, open-loop | 0.05» | 0.05» | 0.05» | um | typ. | | | | Max. velocity | 450 | 450 | 450 | mm/s | | | | | Max. acceleration | 10 | 10 | 10 | m/s2 | | | | | Mechanical properties | | | | Stiffness when powered down | 5»» | 5»» | 5»» | N/um | ±10% | | | | Holding force when powered down | 7 | 7 | 7 | N | max. | | | | Push / pull force | 7 | 7 | 7 | N | max. | | | | Drive properties | | | | Resonant frequency | 155 | 155 | 155 | kHz, typ. | | | | | Integrated piezo motor | 2xPILine® P-664 | 2xPILine® P-664 | 2xPILine® P-664 | | | | | | | (Dual Motor) | (Dual Motor) | (Dual Motor) | | | | | | Motor voltage range | 190 (peak-peak)»»« | 190 (peak-peak)»»« | 190 (peak-peak)»»« | V | | | | | | 67 (RMS)"» | 67 (RMS)»»» | 67 (RMS)"» | | | | | | Operating voltage drive electronics | 12 | 12 | 12 | V | | | | | Max. elec. power consumption drive electronics | 15 | 15 | 15 | W | | | | | Miscellaneous | | | | | | | | | Operating temperature range | -20 to +50 | -20 to +50 | -20 to +50 | °C | | | | | Body material | PEEK-PTFE | PEEK-PTFE | PEEK-PTFE | | | | | | Mass | 0.1 | 0.12 | 0.14 | kg | ±5% | | | | Cable length | 1.5 | 1.5 | 1.5 | m | ±10 mm | | | | Connector | LEMO connector | LEMO connector | LEMO connector | LEMO connector | | | | | Recommended controller/driver | C-184.D64 OEM drive | C-184.D64 OEM drive | C-184.D64 OEM drive | | | | | | | electronics board | electronics board | electronics board | | | | | | | C-185.D64 driver | C-185.D64 driver | C-185.D64 driver | | | | | | | ****C-867.D64 Controller | ****C-867.D64 Controller | ****C-867.D64 Controller | | | | | | | for closed-loop operation | for closed-loop operation | for closed-loop operation | | | | | | *The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to follow the mounting guidelines of the OEM-drives. **Stiffness at 25 °C. | | | | | | | | | | | | | |
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| | | ***The operating voltage is supplied by the drive electronics. ****MDR 14-connector for closed-loop systems separate required | | |
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