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| | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | Nanometer Accuracy in 1 Millisecond with 30-Picometer Resolution PicoCube™ systems provide resolution of 30 picometers and below. The ultra-fast XY/XYZ piezo drives offer resonant frequencies of 9.8 kHz in Z and >3 kHz in X and Y! The high resonant frequency and high-bandwidth capacitive feedback allow step and settle to 1% accuracy in as little as one millisecond. Rugged Design In spite of its ability to move and position on an atomic scale, the PicoCube™ boasts a rugged design for real-world applications. For extra-high stability and reduced mass, the body is precision machined from heat-treated and stress-relieved titanium. The sophisticated frictionless design also ensures that the (moving) top plate protects the internal actuator/sensing unit from contamination. Controller For dynamic scanning operation the E-725.3CM high-power suppliers of digital controller offers advanced linearization algorithms for sub-nanometer precision. Alternatively the analog E-536 PicoCube™ controller (see p. 59) comes in different versions optimized for resolution or power. An optional E-517 24-bit interface module is also available. | | | | | | Objective Scanners & Mirrors Z/Tip/Tilt Stages | | | | | | | | | | 6-Axis Stages Piezo Controllers News & Applications | | | | | | | | | | P-363.3Cx dimensions in mm. Removable top plate P-363.2Cx dimensions in mm. Removable top plate | | | | | | | | | | | | | | | | | | | 1_1 | | | | Technical Data | | | | Model | P-363.3CD | P-363.2CD | Units | | | | Active axes | X, Y, Z | X, Y | | | | | Motion and positioning | | | | Integrated sensor | Capacitive | Capacitive | | | | | Open-loop travel X, Y, -250 to +250 V | ±3 | ±3 | jjm | | | | Open-loop travel, -250 to +250 V | ±2.7 | - | jjm | | | | Closed-loop travel X, Y | ±2.5 | ±2.5 | | | | | Closed-loop travel | ±2.5 | - | jjm | | | | Open-loop resolution | 0.03* | 0.03* | nm | | | | Closed-loop resolution | 0.1 | 0.1nm | | | | | Linearity | 0.05 | 0.05 | % | | | | Repeatability | 1** | 1** | nm | | | | Pitch / yaw in X, Y | 0.5 | 0.5 | | | | | Runout 6X, 6Y (Z motion) | 0.2 | - | | | | | Straightness in X, Y | 33 | nm | | | | Flatness in X, Y | <10 | <10 | nm | | | | Crosstalk X, Y (Z motion) | 5 | nm | | | | Mechanical properties | | | | Unloaded resonant frequency in X, Y | 3.1 | 4.2 | kHz | | | | Unloaded resonant frequency (Z) | 9.8 | - | kHz | | | | Resonant frequency in X, Y | 1.5 (20 g) | 2.1 (20 g) | kHz | | | | Load capacity | 10 | 10 | N | | | | Ceramic type | PICA™, PICA™ Shear | PICA™ Shear | | | | | Miscellaneous | | | | Operating temperature range | -20 to 80 | -20 to 80 | °C | | | | Material | Titanium | Titanium | | | | | Dimensions | 30 x 30 x 40 | 30 x 30 x 28 | mm | | | | Mass | 225 | 190 | g | | | | Cable length | 1.5 | 1.5 | m | | | | Sensor / voltage connection*** Recommended controller | Sub-D connector PicoCube™ E-536 PicoCube™ Controller | Sub-D connector PicoCube™ E-536 PicoCube™ Controller | | | | | Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-536 controller (see p. 59). | | | | *With E-536.3xH Controller **for 10% travel in Z; 50 nm for 100% travel in Z ***P-363.xCL versions with LEMO interconnections | | | | System properties System configuration P-363.3CD Settling time (10% step | Z-axis) with 20 g load and E-536 servo controller width) 1 ms | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |
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