Catalogue PiezoWalk®Drives Nanopositioning with Millimeter-Travel
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Piezo


Nano


Positioning

Selection Guide

PiezoWalk

®

Drives

ModelsDescriptionHolding ForceResolutionTravel N-310NEXACT
® 15 N0.03 nm 20 mmCompact OEM PiezoWalk® Drives(open-loop) N-111NEXLINE
® 80 N0.03 nm 6 mmMiniature High-Load Piezo Nanopositioning Drive(open-loop), 5 nm (closed-loop version)N-214/NEXLINE
® 300 N (N-214)0.03 nm 20 mmN-215High-Load Piezo Nanopositioning Drive(open-loop),600 N (N-215)5 nm (closed-loop version)

Positioning systems with PiezoWalk

®

Drives

ModelsDescriptionResolutionActive AxesTravel N-310K001Compact NEXACT
® 25 nm X20 mmLinear Nanopositioning stage(closed-loop) N-510NEXLINE
® 10 nm Z / Tip / Tilt 1.3 mm (Z)Z, Tip, Tilt Platform, 200 N(closed-loop)(parallel kinematics)10 mradN-511NEXLINE
® 5 nmZ / Tip / Tilt1 mm (Z)Z, Tip, Tilt Platform, 500 N(closed-loop)(parallel kinematics)8 mrad N-512NEXLINE
® 15 nm X, Y6 x 6 mmX, Y Platform, 100 N, Non-Magnetic(closed-loop)

5

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Contents table
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