Piezo • Nano • Positioning PiezoWalk
® Precision Drives –Millimeter Travel, Nanometer Resolution, High Forces
® principle: NEXLINE PiezoWalk
® and NEXACT
® . Bothprovide specific advantages depending on the application.PiezoWalk
® drives break awayfrom the limitations of conven- tional Nanopositioning actua-tors. They offer a basicallyunlimited travel range andstillprovide the characteristic features of a piezoelectric actuator: an open-loop resolu- tion down to 30 picometers and a very high stiffness for dynam- ic operation and force genera-tion. PI offers two product lines
® piezo steppingdrives usually consist of sever-al individual piezo actuators and generate motion through succession of coordinated clamp / unclamp and shear- motion cycles (steps). Each cycle provides only a fewmicrons of movement, but run-ning at hundreds of hertz, the drive achieves continuous motion in the mm/second range. The PiezoWalk
50 picometer steps with a NEXLINE ® drive, measured with external ultra-high-resolution capacitive sensor.Thisperformance provides a big safetymargin for next generation nano- technology applications ® working princi-ple provides high force capabil- ities, resolution and repeatabil- ity. These properties are typi-cally better for piezo stepping actuators compared to inertia drives or ultrasonic motors.The operation is possible intwo different modes: a high- resolution, high dynamics ana- log mode within a single step, and a step mode with virtually unlimited travel range.
Custom PiezoWalk ® industrial linear actuator Features and Advantages ofPiezoWalk
® PiezoWalk
® drives are availa-ble for non-magnetic appli- cations such as super-con- ductivity experiments. They do not create magneticfields nor are they influen-ced by them. Drives Very high resolution, limitedtypically only by the sensor. In fine-adjustment, analog mode, resolution of 30 pico- meters has been demonstra-ted. The active parts in PiezoWalk
® drives are madeof vacuum-compatible cera- mics. The drives also work in UV-light environments. High force generation andstiffness. NEXLINE
® drivescan hold and generate for- ces to 600 N, NEXACT
6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215 based NEXLINE ® high-load actuators for use in strong magnetic fields ® to15N. NEXLINE
® drives can surviveshock loads of several g during transportation. PiezoWalk
® drives hold astable position to nanome- ter level in power-off mode. Due to the actuator design, the maximum clampingforce is applied at rest. PiezoWalk
® drives are available in three levels of integration to provide flexibility for OEMs: OEMdrives, packaged actuatorsand integrated into complex positioning systems such as multi-axis translation stages or 6-DOF Hexapods. based on different versions of the PiezoWalk Because a position can beheld with zero operating vol- tage, leakage currents can- not affect the integrity of the piezo drive.
NEXLINE ® linear actuator principle 3