N-310K001
Compact NEXACT
® Travel Range 20 mm
Linear encoder for Direct
Metrology, 25 nm Resolution Drive Force 10 N Compact Design Velocity 10 mm/s
N-510
High-Force NEXLINE
® Z, Tip, Tilt Platform
Parallel-Kinematic-Design 1.3 mm Vertical Travel, 10 mrad Tip / Tilt Angle 300 mm Diameter 200 N Load Capacity For Semiconductor Industry, Wafer Alignment
N-511
High-Force NEXLINE
® XYZ Platform
500 N Load Capacity 1 mm Vertical Travel / 8 mrad Tip / Tilt Angle Linear Encoder for Direct Metrology, 5 nmResolution With Special 3-Channel NEXLINE
® Electronics
N-512
Non-Magnetic, High-Force NEXLINE
® Open-Frame Stage
100 N Load Capacity 6 x 6 mm Travel Range Linearencoder for Direct Metrology, 5 nm Resolution For Superconductivity Experiments
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