N-214 · N-215
NEXLINE
® High-Load Piezo Nanopositioning Stepping Drive
Ordering Information N-214.00 NEXLINE ® High-Load Actuator,20mm, 200 N, linear encoder, 5 nm resolution N-215.00 NEXLINE ® High-Load Actuator,20mm, 400 N, open-loop ® PiezoWalk
® Piezo-ceramic clamping and shear
elements act directly on a mov-ing runner that is coupled tothe moved object. While the
runner can be moved larger
distances in step mode, analog
operation over a distance ofless than one step enables
high-dynamics positioningwith resolutions far below one Unlimited Lifetime The application area of NEX-LINE
N-215 NEXLINE ® high-load actuator
Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE 20 mm Travel Range 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop To 400 N Push / Pull Force and 600 N Holding Force nanometer. The patentedPiezoWalk Self Locking when Power down, No Heat Generation
® overcomes the limi-tations of conventional nanopo-sitioning actuators and com-bines long travel ranges with
high resolution and stiffness. Non-Magnetic and Vacuum-Compatible Working Principle
® drives often lies in thedifficult-to-access internals ofmachines, where nanometer-realm adjustment and vibration
cancellation are required. Long lifetime is therefore abasic requirement for NEX-LINE The innovative N-214 / N-215NEXLINE
® supports two differ-ent motion modes: a high-reso-
lution, high-dynamics short
range (analog) mode and a
stepping mode with virtuallyunlimited travel range. Basically Unlimited TravelRange
® OEM linear drivesare ultra-precision nanoposi-
tioning actuators with travel
ranges to 20 mm and push /
pull forces to 400 N. The novel,patented NEXLINE High-Resolution Dynamic
Operation In analog mode the motion iseffectuated exclusively by the
very stiff shear elements, pro-
viding a resonant frequency in
the direction of motion of sev-eral kilohertz. The motion reso-lution here is limited only by
the stability of the drive elec-
tronics, or, in closed-loop oper-
ation, by the sensor.
® actuators. To promotelong lifetime, the controller canreduce the operating voltageon all the piezo elements to
zero at any position and still
maintain the full holding force.
® PiezoWalk
® drive design combines longtravel ranges with high
mechanical stiffness and piezo-
class resolution of better than
0.1nm. PiezoWalk Two versions are available, theN-214 closed-loop model and
N-215 open-loop model. Both
can be operated with the
sophisticated E-755 NEXLINE Note The products described in thisdocument are in part protected
by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
® motion controller. The N-214 is
equipped with a 5 nm resolu-
tion linear encoder for long-
range position control. Due to
its low-noise, 24 bit D/A conver-ters, the E-755 controller canprovide picometer level resolu-
tion in the highly-dynamic
short-range / dithering mode.
Application example Semiconductor technology
Step mode involves a sequence of coordinated shear and clamping moves. That is whypiezo stepping drives have no
intrinsic travel limitation and
can be used flexibly. The max.
step frequency of 100 Hz and isdetermined by the controller.Itallows velocities up to
1mm/s, depending on the step
size and/or analog range.
Semiconductor testing Wafer inspection Nano lithography
NEXLINE
® Working Principlefor Application Flexibility
Nano imprint
® ® Nanometrology
NEXLINE PiezoWalk drivescan be used wherever high
loads must be positioned veryprecisely over long distancesand then perhaps subjected to
small-amplitude dynamic ad-
justment, as for active vibra-tion control. By varying the
combination of longitudinal
and shear piezo elements, the
step size, dynamic operatingrange (analog travel), clampingforce, speed and stiffness can
all be optimized for a particular
application.NEXLINE
Active vibration damping Motion in strong magnetic fields
® actuator © PI 1998-2007.Subject to change without notice. This data sheet is superseded by any new
release. The newest release is available for download at www.pi.ws. R2 07/06/27.0.5 10