N-111

NEXLINE

®

OEM Piezo Nanopositioning Stepping Drive

Ordering Information N-111.30 ® ® NEXLINE OEM NanopositioningDrive, 5 mm, 50 N PiezoWalk
® Piezo-ceramic clamping and shear elements act directly on a mov- ing runner that is coupled to the moved object. While the runner can be moved larger distances in step mode, analog operation over a distance ofless than one step enables
N-111.3A NEXLINE ® OEM NanopositioningDrive, 5 mm, 50 N, Closed-Loop, 5nm Resolution Ask about custom designs high-dynamicspositioningwith resolutions far below onenanometer. The patented PiezoWalk Self-locking when powereddown; no holding current Advantages of PiezoWalk
® overcomes thelimitations of conventional nanopositioning actuators and combines long travel ranges with high resolution and stiff- ness. Zero backlash, no wear or maintenance, no mechanical components like gears or leadscrews.
N-111 compact high-load OEM nanopositioning actuator NEXLINE Non-magnetic and vacuum compatible operating prin- ciple 5 mm Travel To 50 N Pull / Push Force and 80 N Holding Force
® Self Locking at Rest, no Heat Generation Piezo Stepping Drives
® Actuators aredistinguished by a number of unique outstanding features: Non-Magnetic and Vacuum-Compatible Working Principle NEXLINE
® and NEXACT
® drivesoffer several advantages overtraditional drive technologies: Cleanroom compatibility Vacuum compatibility The innovative N-111 NEX-LINE Resolution in the picometerrange Notes Operation under conditions, which prohibit usage of magnetic drives
® OEM drives are compactactuators for nanopositioning with travel ranges to 5 mm, high resolution, and generatedforces to 50 N.Two versions are available, theN-111.3A closed-loop model and N-111.30 open-loop mo- del. Both can be operatedwiththe sophisticated E-755 NEXLINE NEXLINE The products described in thisdocument are in part protected by the following patents: German Patent No. 10148267 US Patent No. 6,800,984
® motion controller.The N-111.3A is equipped with a 5 nm resolution linear enco- der for long-range positioncontrol. Due to its low-noise,24 bit D/A converters, the E-755 controller can provide pico- meter level resolution in the highly-dynamic short-range / dithering mode. Compact dimensions High drive forces from ten newtons (NEXACT
® ) up toseveral hundred newtons(NEXLINE
® ) High dynamic performancewith sub-microsecond res-ponse
Application Examples ® Working Principlefor Application Flexibility

Semiconductor technology

NEXLINE
® PiezoWalk
® drivescan be used wherever highloads must be positioned veryprecisely over long distances and then perhaps subjected to small-amplitude dynamic ad- justment, as for active vibra- tion control. By varying thecombination of longitudinaland shear piezo elements, the step size, dynamic operating range (analog travel), clamping force, speed and stiffness can all be optimized for a particularapplication.NEXLINE

Semiconductor testing Wafer inspection Nano lithography Nano imprint Nanometrology Active vibration damping Motion in strong magnetic fields

Z / tip / tilt platform with NEXLINE ® drives and position sensors; 300 mm (12”) diameter, 200 N load capacity, 1.3 mm travel range, 10 mrad tilt range © PI 1998-2007.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. R1 07/06/27.0.5 8 8