N-310K001

Compact NEXACT

®

Linear Nanopositioning stage

Travel Range 20 mm Linear encoder for Direct Metrology, 25 nm Resolution Drive Force 10 N Compact Design Velocity 10 mm/s

N-510

High-Force NEXLINE

®

Z, Tip, Tilt Platform

Parallel-Kinematic-Design 1.3 mm Vertical Travel, 10 mrad Tip / Tilt Angle 300 mm Diameter 200 N Load Capacity For Semiconductor Industry, Wafer Alignment

N-511

High-Force NEXLINE

®

XYZ Platform

500 N Load Capacity 1 mm Vertical Travel / 8 mrad Tip / Tilt Angle Linear Encoder for Direct Metrology, 5 nmResolution With Special 3-Channel NEXLINE
® Electronics

N-512

Non-Magnetic, High-Force NEXLINE

®

Open-Frame Stage

100 N Load Capacity 6 x 6 mm Travel Range Linearencoder for Direct Metrology, 5 nm Resolution For Superconductivity Experiments
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