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XYZ stage, Linear motor, Servo-cylinder, Piezoelectric actuator, Position sensor
Text version of the page
Increased Lifetime ThroughHumidity Resistance The monolithic ceramic-en-capsulated design provides
better humidity protection thanpolymer-film insulation. Diffu-sion of water molecules into
the insulation layer, is greatly
reduced by the use of cofired,
outer ceramic encapsulation. High-Level DynamicPerformance—Very WideTemperature Range
PICMA ® piezo actuators are currently available with cross-sections of 2 x 3, 3 x 3, 5 x 5 and 10 x 10 mm. Award-Winning Technology
® actuatorsa usable temperature rangeextending up to 150 °C. Thismeans that they can be operat- ed in hotter environments, or they can be driven harder in dynamic operation. With con- ventional multilayer actuators,heat generation—which is pro-portional to operating frequen- cy—either limits the operating frequency or duty cycle in dynamic operation, or makes ungainly cooling provisions necessary.At the low end, operationdown to a few Kelvin is possi- ble (with reduction in perform- ance specifications). Low Operating Voltage Superior Lifetime Even Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10
-9 hPa Sub-Millisecond Response & Sub-Nanometer Resolution New Production Process,Optimized PZT Ceramics PICMA Increased Lifetime and HigherPerformance PICMA
® (PI Ceramic MonolithicActuator) piezo actuators arecharacterized by their high per- formance and reliability, even in extremely harsh environ-ments. They are superior toconventional multilayer actua- tors in industrial applications and high-endurance situations, where they show substantially longer lifetimes both in staticand dynamic operation.
Application Examples
PiezoPositioner,PiezoZStage,Z piezostage
The high Curie temperature of320 °C gives PICMAPiezoMove Flexure Actuators - 13949 P-882 – P-888
PICMA
®High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)
Optimum UHV Compatibility— No Outgassing The lack of polymer insulationand the high Curie temperature make for optimal ultra-high- vacuum compatibility (no out-gassing / high bakeout temper-atures, up to 150 °C) Ideal for Closed-LoopOperation The ceramic surface of theactuators is extremely wellsuited for use with resistive or optical fiber strain gauge sen- sors. Such sensors can be eas- ily applied to the actuator sur- face and exhibit significantlyhigher stability and linearitythan with conventional poly- mer-insulated actuators. Amplifiers, Drivers &Controllers PI offers a wide range of con-trol electronics for piezo actua- tors from low-power drivers to multichannel, closed-loop, digital controllers. Of course, PI also designs custom amplifiersand controllers.PICMA ® piezo actuators are currently available with cross-sections of 2 x 3, 3 x 3, 5 x 5 and 10 x 10 mm. Award-Winning Technology
® actuatorsa usable temperature rangeextending up to 150 °C. Thismeans that they can be operat- ed in hotter environments, or they can be driven harder in dynamic operation. With con- ventional multilayer actuators,heat generation—which is pro-portional to operating frequen- cy—either limits the operating frequency or duty cycle in dynamic operation, or makes ungainly cooling provisions necessary.At the low end, operationdown to a few Kelvin is possi- ble (with reduction in perform- ance specifications). Low Operating Voltage Superior Lifetime Even Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10
-9 hPa Sub-Millisecond Response & Sub-Nanometer Resolution New Production Process,Optimized PZT Ceramics PICMA Increased Lifetime and HigherPerformance PICMA
® (PI Ceramic MonolithicActuator) piezo actuators arecharacterized by their high per- formance and reliability, even in extremely harsh environ-ments. They are superior toconventional multilayer actua- tors in industrial applications and high-endurance situations, where they show substantially longer lifetimes both in staticand dynamic operation.
Application Examples