PiezoMove Flexure Actuators - Physik Instrumente - #11

/ 24


catalogue search
P. 01
P. 02
P. 03
P. 04
P. 05
P. 06
P. 07
P. 08
P. 09
P. 10
P. 11
P. 12
P. 13
P. 14
P. 15
P. 16
P. 17
P. 18
P. 19
P. 20
P. 21
P. 22
P. 23
P. 24
Pages:


See other catalogues for Physik Instrumente

Text version of the page
Piezo • Nano • Positioning

PiezoMove Flexure Actuators - 13949 PL022 · PL033 · PL055

PICMA

®

Chip Monolithic Multilayer Piezo Actuators (LVPZT)

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position Sensors Piezo Drivers & Nano- positioning Controllers PICMA ® Chip actuators are the smallest ceramic-encapsulated multilayer piezoactuators available. Standard cross-sections range from 2 x 2 to 5 x 5 mm. Hexapods / Micropositioning Photonics Alignment Solutions Ceramic Encapsulation for Extended Lifetime Ultra-Compact, from 2 x 2 x 2 mm
Motion Controllers High Curie Temperature Optimized PZT Ceramics,Humidity Resistance Ideal for Dynamic Operation
Ceramic Linear Motors & Stages Sub-Millisecond Response / Sub-Nanometer Resolution PICMA UHV Compatible to 10
-9 hPa Optimum UHV Compatibility— No Outgassing
Index Superior Lifetime The lack of polymer insulationand the high Curie tempera- ture make for optimal ultra- high-vacuum compatibility (nooutgassing / high bakeout tem-peratures of up to 150 °C). Ultra-Compact MonolithicPiezo Actuators Long Lifetime and HighPerformance—Ideal for Dynamic Operation Amplifiers, Drivers &Controllers PICMA PICMA
® Chip actuators are thesmallest monolithic multilayer piezo actuators available. Providing sub-nanometer reso- lution and sub-millisecond response, they are ideally suited to high-level dynamicapplications. PICMA
® actuators are madefrom a ceramic material in which the piezoceramic prop- erties such as stiffness, capaci- tance, displacement, tempera- ture stability and lifetime areoptimally combined. Themonolithic, ceramic-encapsu- lated design provides better humidity protection than poly- mer-film insulation. PI offers a wide range of con-trol electronics for piezo actua- tors from low-power drivers to multi-channel, closed-loop, digital controllers. Of course, PI also designs custom ampli-fiers and controllers.
® actuatorsconsist of a highly reliable ceramic-encapsulated PZT block with solderable termina- tions, and come in standard sizes as small as 2 x 2 x 2 mm.
® Chip actuators aresuperior to conventional actua- tors in high-endurance situa-tions, where they show sub-stantially longer lifetimes both in static and dynamic opera- tion, even in harsh environ- ments. Due to their high reso- nant frequency, these actua- tors are ideally suited for dynamic operation with lightloads; an external preload isrecommended for dynamic operation with larger loads. The high Curie temperature of 320 °C provides a usable tem- perature range extending up to 150 °C, well above the 80 °C limit of conventional multilayeractuators. At the low end, ope-ration down to a few Kelvin is possible (with reduction in per- formance specifications).
Dimensions in mm. Application Examples

Static and dynamicnanopositioning

Technical Data / Product Order Numbers Recommended preload for dynamic operation 15 to 30 MPa Max. operating voltage: -20 to +100 V Max. operating temperature: 150°C Standard Mechanical Interface: ceramic (top & bottom)Standard Electrical Interface: solderable termination Available Options: special mechanical interfaces, etc.Other specifications on request.

Laser tuning

Order Dimensions Displacement Blocking Electrical Resonant

Micro-dispensing

number*A x B x TH [µm @ 100 V]force capacitancefrequency in mm±20%[N][nF] ±20%[kHz]

Interferometry

PL022.302 x 2 x 22.2> 25025> 300 PL033.303 x 3 x 22.2> 30050> 300PL055.305 x 5 x 22.2> 500250> 300

Life sciences Photonics

* For optional wire leads change order number extension to .x1 (e.g. PL022.31)Resonant frequency measured at 1 V © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 pp , capacitance measured at 1 V pp , 1 kHz. 1-11

pageCatalog pdf di En 2012-02-07-15