Piezo • Nano • Positioning Sy m bols an d Units
ASurface area [m >
2 ] (meter >
2 ) >
Piezo actuators Piezo Actuators Coefficient of Thermal Expansion (CTE) [K >
-1 ] (1/kelvin)CCapacitance (F) [A >
Nanopositioning &
Scanning Systems Nanopositioning &Scanning Systems s/V]d >
Active Optics / Steering Mirrors Active Optics / Steering Mirrors ij Piezo modulus (tensor components) [m/V] (meter/volt)d >
Tutorial: Piezo-
electrics in Positioning Tutorium: Nanoposi-
tionieren mit Piezos s Distance, thickness [m] (meter) >
Capacitive Position sensors Capacitive Position
Sensors Dielectric constant [A s/V m] (ampere · second / volt · meter)EElectric field strength [V/m] (volt/meter)
fOperating frequency [Hz] (hertz = 1/second)
FForce [N] (newton)f >
Piezo Drivers & Nano-
positioning controllers Piezo Drivers & Nano-positioning Controllers Hexapods /
Micropositioning Hexapods /Micropositioning Photonics Alignment
Solutions Photonics Alignment
Solutions Industrial motion controllers Motion Controllers Unloaded resonant frequency [Hz] (hertz = 1/second)gAcceleration due to gravity: 9.81 m/s >
Ceramic Linear motors & Stages Ceramic Linear Motors & Stages 2 (meter/second >
2 )iCurrent [A] (ampere)k >
Index Index S Stiffness of restraint (load) [N/m] (newton/meter)k >
T Stiffness of piezo actuators [N/m] (newton/meter)L >
Length of non-energized actuator [m] (meter) LChange in length (displacement) [m] (meter) L >
Nominal displacement with zero applied force, [m] (meter) L >
t=0.1 Displacement at time t = 0.1 sec after voltage change, [m] (meter)mMass [kg] (kilogram)PPower [W] (watt)
QCharge [C] (coulomb = ampere x second)SStrain [ L/L] (dimensionless)tTime [s] (second)T >
C Curie temperature [°C]UVoltage [V] (volt)U >
p-p Peak-to-peak voltage [V] (volt) >
4-7