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Physik Instrumente - 40596, 84070, 2632, 165747, 2634
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Piezo Nano Positioning

Sy m bols an d Units

ASurface area [m
2 ] (meter
2 )
Piezo actuators Piezo Actuators Coefficient of Thermal Expansion (CTE) [K
-1 ] (1/kelvin)CCapacitance (F) [A
Nanopositioning & Scanning Systems Nanopositioning &Scanning Systems s/V]d
Active Optics / Steering Mirrors Active Optics / Steering Mirrors ij Piezo modulus (tensor components) [m/V] (meter/volt)d
Tutorial: Piezo- electrics in Positioning Tutorium: Nanoposi- tionieren mit Piezos s Distance, thickness [m] (meter)
Capacitive Position sensors Capacitive Position Sensors Dielectric constant [A s/V m] (ampere · second / volt · meter)EElectric field strength [V/m] (volt/meter) fOperating frequency [Hz] (hertz = 1/second) FForce [N] (newton)f
Piezo Drivers & Nano- positioning controllers Piezo Drivers & Nano-positioning Controllers Hexapods / Micropositioning Hexapods /Micropositioning Photonics Alignment Solutions Photonics Alignment Solutions Industrial motion controllers Motion Controllers Unloaded resonant frequency [Hz] (hertz = 1/second)gAcceleration due to gravity: 9.81 m/s
Ceramic Linear motors & Stages Ceramic Linear Motors & Stages 2 (meter/second
2 )iCurrent [A] (ampere)k
Index Index S Stiffness of restraint (load) [N/m] (newton/meter)k
T Stiffness of piezo actuators [N/m] (newton/meter)L
Length of non-energized actuator [m] (meter) LChange in length (displacement) [m] (meter) L
Nominal displacement with zero applied force, [m] (meter) L
t=0.1 Displacement at time t = 0.1 sec after voltage change, [m] (meter)mMass [kg] (kilogram)PPower [W] (watt) QCharge [C] (coulomb = ampere x second)SStrain [ L/L] (dimensionless)tTime [s] (second)T
C Curie temperature [°C]UVoltage [V] (volt)U
p-p Peak-to-peak voltage [V] (volt)
4-7
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