Glossary

Drift: See also the MicropositioningGlossary, p. 7-12. See “creep”
Piezo actuators Piezo Actuators Monolithic Multilayer Actuator: Actuator: Domain:
Nanopositioning & Scanning Systems Nanopositioning & Scanning Systems An actuator manufactured in afashion similar to multilayer ce-ramic capacitors manufacturer. Ceramic and industrial electrode material are cofired in one step. Layer thickness is typi- cally on the order of 20 to 100 µm. A device that can produce force ormotion (displacement). A region of electric dipoles withsimilar orientation. Open-Loop Operation:
Active Optics / Steering Mirrors Active Optics / Steering Mirrors The actuator is used without aposition sensor. Displacementroughly corresponds to the drivevoltage. Creep, nonlinearity and hysteresis remain uncompensat- ed. Blocked Force: HVPZT:
Tutorial: Piezo- electrics in Positioning Tutorium: Nanoposi- tionieren mit Piezos The maximum force an actuatorcan generate if blocked by an infi-nitely rigid restraint. Acronym for High-Voltage PZT(actuator). Parallel Kinematics:
Capacitive Industrial position sensors Capacitive Position Sensors Piezoceramic layers in a monolithic actuator (LVPZT). Unlike in serial kinematics de-signs, all actuators act upon the same moving platform. Advan- tages: Minimized inertia, no moving cables, lower center of gravity, no cumulative guidingerrors and more-compact con- struction.
Piezo Drivers & Nano- positioning controllers Piezo Drivers & Nano- positioning Controllers Ceramic: A polycrystalline, inorganic mate-rial.
Hexapods / Micropositioning Hexapods / Micropositioning Photonics Alignment Solutions Photonics Alignment Solutions Closed-Loop Operation: The displacement of the actuatoris corrected by a servo-controller compensating for nonlinearity, hysteresis and creep. See also “Open-Loop Operation“. Compliance:
Motion controllers Motion Controllers Ceramic Linear motors & Stages Ceramic Linear Motors & Stages Index Index Hysteresis: Displacement produced per unitforce. The reciprocal of stiffness. Hysteresis in piezo actuators isbased on crystalline polarizationand molecular effects and occurs when reversing driving direction. Hysteresis is not to be confused with backlash.
Piezoceramic layers in a “classical” stack actuator (HVPZT). Creep: An unwanted change in the dis-placement over time. Curie Temperature: The temperature at which thecrystalline structure changes from a piezoelectric (non-symmetrical) to a non-piezoelectric (symmetri-cal) form. At this temperature PZT ceramics looses the piezoelectric properties.
Nanopositioning system featuring parallel kinematics and parallel metrology. Equipment for fully automated industrial screen printing of electrodes on piezoelectric and dielectric ceramics. 4-5