Piezo

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Nano

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Positioning

Dynamic Digital Linearization(DDL)

Piezo actuators Piezo Actuators

DDL is similar in performanceto Input Preshaping, but is sim- pler to use. In addition, it can optimize multi-axis motion such as a raster scan or tracing an ellipse. This method requires no external metrology or signal processing, but isfully integrated in E-710 and E-711 digital controllers. DDL uses the position information from capacitive sensors inte- grated in the piezo mechanics (requires direct metrology) to calculate the optimum controlsignal. As with preshaping, theresult is an improvement in lin- earity and tracking accuracy of up to 3 orders of magnitude.

Nanopositioning & Scanning Systems Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Active Optics / Steering Mirrors Tutorium: Nanoposi- tionieren mit Piezos Tutorial: Piezo- electrics in Positioning Capacitive Industrial position sensors Capacitive Position Sensors Piezo Drivers & Nano- positioning controllers Piezo Drivers & Nano- positioning Controllers Hexapods / Micropositioning Hexapods / Micropositioning Photonics Alignment Solutions Photonics Alignment Solutions
Fig. 37 a. Elliptical scan in a laser micro-drilling application with XYpiezo scanning stage, conventional Pid controller. The outer ellipsedescribes the target position, the inner ellipse shows the actual motion at the stage. Motion controllers Motion Controllers Ceramic Linear motors & Stages Ceramic Linear Motors & Stages Index Index
Fig. 37 b. Same scan as before, with a DDL controller. Target and actual data can hardly be discerned. The tracking error has been reduced to a few nanometers.

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