Note The actuator capacitance val-ues indicated in the technical
data tables are small-signal val-
ues (measured at 1 V, 1000 Hz,20 °C, unloaded) The capaci-tance of piezoceramics chan-
ges with amplitude, tempera-
ture, and load, to up to 200 % of
the unloaded, small-signal,
room-temperature value. For
detailed information on powerrequirements, refer to theamplifier frequency response
curves in the “Piezo Drivers &
Nanopositioning Controllers”
section. Static Operation When electrically charged, theamount of energy stored in the
piezo actuator is E = (1/2) CU
Piezo
• >
Nano
• >
Positioning
Piezo Act u ator Electrical F u n d a m entals
Electrical Requirements for Piezo Operation
General When operated well below theresonant frequency, a piezoactuator behaves as a capaci-
tor: The actuator displacement
is proportional to stored charge
(first order estimate). The
capacitance of the actuator
depends on the area and thick-
ness of the ceramic, as well as
on its material properties. Forpiezo stack actuators, whichare assembled with thin, lami-
nar wafers of electroactive
ceramic material electrically
connected in parallel, the
capacitance also depends on
the number of layers.The small-signal capacitance ofa stack actuator can be estimat-
ed by:(Equation 14)
Piezo actuators Piezo Actuators >
Where:C= capacitance [F (As/V)]n = number of layers =
Nanopositioning &
Scanning Systems Nanopositioning &
Scanning Systems Active Optics / Steering Mirrors Active Optics / Steering Mirrors Tutorial: Piezo-
electrics in Positioning >
Tutorial: Piezo-
electrics in Positioning Capacitive
Position sensors Capacitive Position
Sensors Piezo Drivers & Nano-
positioning controllers Piezo Drivers & Nano-
positioning Controllers >
2 Hexapods /
Micropositioning Hexapods /
Micropositioning >
Every change in the charge
(and therefore in displacement)of the PZT ceramics requires acurrent i:(Equation 15)Relationship of current andvoltage for the piezo actuator
Photonics Alignment
Solutions Photonics Alignment
Solutions
Motion controllers Motion Controllers Ceramic
Linear motors & Stages Ceramic Linear Motors & Stages Index Index >
Where:i= current [A]Q = charge [coulomb (As)]
C = capacitance [F]
U = voltage [V]t = time [s] For static operation, only theleakage current need be sup-
plied. The high internal resist-
ance reduces leakage currents
to the micro-amp range or less.Even when suddenly discon-nected from the electrical
source, the charged actuator
will not make a sudden move,
but return to its uncharged
dimensions very slowly. For slow position changes,only very low current isrequired. Example: An amplifier with anoutput current of 20 µA can
fully expand a 20 nF actuator in
one second. Suitable amplifierscan be found using the “Con-
trol Electronics Selection
Guide” on p. 6-8.
33T = dielectric constant[As/Vm]A = industrial electrode surface areaof a single layer [m
2 ]
d
S = distance between theindividual electrodes
(layer-thickness) [m] I
= actuator length The equation shows that for agiven actuator length, thecapacitance increases with thesquare of the number of layers.
Therefore, the capacitance of a
piezo actuator constructed of
100 µm thick layers is 100 times
the capacitance of an actuator
with 1 mm layers, if the twoactuators have the samedimensions. Although the actu-
ator with thinner layers draws
100 times as much current, thepower requirements of the twoactuators in this example areabout the same. The PI high-
voltage and low-voltage ampli-
fiers in this catalog are de-
signed to meet the require-
ments of the respective actua-
tor types.
Fig. 25. Design of a piezo stack actuator. 4-27