Flexibility: PI Ceramic’sStrength All manufacturing processes atPI Ceramic are set up for flexi- bility. Should our standard actuators not fit your applica-tion, let us provide you with acustom design. Our engineers will work with you to find the optimum solution at a very attractive price, even for small quantities. Some of our cus- tom capabilities are listed be- low:

P-111– P-151

PICA

™

-Shear Piezo Actuators—Compact Multiaxis Motion

Amplifiers, Drivers &Controllers The E-507.36 amplifier moduleis recommended for operation of PICA
™ -Shear actuators.
Custom made PICA TM -Shear actuators PICA Compact Multiaxis Actuators X, XY, XZ and XYZ Versions High Resonant Frequencies Optional Vacuum Versions to 10
-9 9 hPa Extreme Reliability >10 Cycles Non-Magnetic Designs Picometer-Resolution / Sub-Millisecond Settling Time Clear Aperture Optional UHV-Compatible Versions to 10
-9 hPa on request Custom Endplates (Industrial alumina, Glass, ...) Non-Magnetic and Clear Aperture Versions Extra-Tight Length Tolerances, to 0.02 mm High Stiffness under HighDuty Cycles PICA
™ -Shear series multi-axispiezo actuators are made only by PI Ceramic. These devices are extremely compact andfeature sub-namometer resolu-tion and ultra-fast response. They are available in a variety of geometries providing dis- placements to 10 µm. Optical Surface Quality Custom Geometries PICA Custom Displacement
™ -Shear X and XY actua-tors show almost twice the dis- placement amplitudes of con- ventional piezo actuators at thesame electric field. Conse-quently they can be made smaller and have higher reso- nant frequencies. This results in reduced power require- ments for a given induced dis-placement in dynamic X- andY-axis operation. Custom Load / Force Ranges Ultra-High Reliability, HighDisplacement, Low Power Requirements Low-Temperature Designs, Down to Liquid-He Short Leadtime for Standard& Custom Designs Combination with Piezoelectric Shear Sensors (no Pyroelectric Effect) Because all piezoelectric mate-rials used in PICA
™ -Shear actuators exhibithigh stiffness, both parallel and perpendicular to themotion direction. Based on the piezoelectric shear effect, PICA
™ actuatorsare manufactured at PI Ceramic, leadtimes are short and quality is outstanding. Allstandard and custom PICA
Application Examples

Nanopositioning

™ ™ -Shear actuator dimensions,in mm. See technical data table forexplanation of A, B, L

Precision mechanics

PICA
™ actuators are specifically actuators are delivered withperformance test sheets.

Active vibration cancellation

designed for high-duty-cycleapplications. All materials usedare specifically matched for robustness and lifetime. En- durance tests proved con- sistent performance even after billions (1,000,000,000) of cyc- les. The combination of highdisplacement and low electri-cal capacitance provides for excellent dynamic behavior with reduced driving power requirements.

Semiconductor manufacturing and testing Laser tuning Atomic force microscopy Switching Scanning applications Linear motors

™ © PI 1998–2006. Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/10/30.0 Axis and lead assignment for PICA -Shear actuators 22