Increased Lifetime ThroughHumidity Resistance The monolithic ceramic-en-capsulated design provides better humidity protection than polymer-film insulation. Diffu- sion of water molecules intothe insulation layer, is greatlyreduced by the use of cofired, outer ceramic encapsulation. High-Level DynamicPerformance—Very Wide Temperature Range The high Curie temperature of320 °C gives PICMA

P-882 – P-888

PICMA

®

High-Performance Monolithic Multilayer Piezo Actuators

Optimum UHV Compatibility— No Outgassing Ideal for Closed-LoopOperation The lack of polymer insulationand the high Curie temperature make for optimal ultra-high- vacuum compatibility (no out- gassing / high bakeout temper- atures, up to 150 °C) Amplifiers, Drivers &Controllers The ceramic surface of theactuators is extremely well suited for use with resistive oroptical fiber strain gauge sen-sors. Such sensors can be eas- ily applied to the actuator sur- face and exhibit significantly higher stability and linearity than with conventional poly- mer-insulated actuators. PI offers a wide range of con-trol electronics for piezo actua-tors from low-power drivers to multichannel, closed-loop, digital controllers. Of course, PI also designs custom amplifiers and controllers.
PICMA ® piezo actuators are currently available with cross-sections of 2 x 3, 3 x 3, 5 x 5, 7x7 and 10 x 10 mm Award-Winning Technology Low Operating Voltage
® actuatorsa usable temperature range extending up to 150 °C. This means that they can be operat-ed in hotter environments, orthey can be driven harder in dynamic operation. With con- ventional multilayer actuators, heat generation—which is pro- portional to operating frequen-cy—either limits the operatingfrequency or duty cycle in dynamic operation, or makes ungainly cooling provisions necessary.At the low end, operationdown to a few Kelvin is possi-ble (with reduction in perform- ance specifications). Superior Lifetime Even Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10
-9 hPa Sub-Millisecond Response & Sub-Nanometer Resolution New Production Process,Optimized PZT Ceramics Increased Lifetime and HigherPerformance PICMA PICMA
® (PI Ceramic MonolithicActuator) piezo actuators are characterized by their high per- formance and reliability, evenin extremely harsh environ-ments. They are superior toconventional multilayer actua-tors in industrial applicationsand high-endurance situations, where they show substantially longer lifetimes both in static and dynamic operation.
Application Examples

Precision mechanics andmechanical engineering

® piezo actuators aremade from a ceramic material in which the piezoceramicproperties such as stiffness,capacitance, displacement, temperature stability and life- time are optimally combined. The actuators’ monolithic design and special electrodestructure was made possibleby advances in production technology. This development is just one reflection of the more than 40 years experience PI & PI Ceramic have withthousands of industrial PZT applications.

Nanopositioning / high- speed switching Active and adaptive optics Vibration cancellation Pneumatic & industrial hydraulic valves Metrology / interferometry

® actuator with optional wire leads and rounded top piece for decoupling lateral forces optional

Life sciences, medicine and biology

PICMA ® dimensions, in mmPICMA © PI 1998–2006. Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/10/30.0 14