PL022 · PL033 · PL055
PICMA
® Chip Monolithic Multilayer Piezo Actuators
Piezo Piezo Piezo · · · Nano Nano Nano · · · Positioning Positioning Positioning
PICMA ® Chip actuators are the smallest ceramic-encapsulated multilayer piezoactuators available. Standard cross-sections range from 2 x 2 to 5 x 5 mm Ceramic Encapsulation for Extended Lifetime Ultra-Compact, from 2 x 2 x 2 mm High Curie Temperature Ideal for Dynamic Operation Sub-Millisecond Response / Sub-Nanometer Resolution Optimized PZT Ceramics,Humidity Resistance UHV Compatible to 10
-9 hPa Optimum UHV Compatibility— Superior Lifetime PICMA No Outgassing Amplifiers, Drivers &Controllers The lack of polymer insulationand the high Curie tempera-
ture make for optimal ultra-
high-vacuum compatibility (no
outgassing / high bakeout tem-
peratures of up to 150 °C). PI offers a wide range of con-trol electronics for piezo actua-
tors from low-power drivers tomulti-channel, closed-loop,digital controllers. Of course,
PI also designs custom ampli-
fiers and controllers. Ultra-Compact MonolithicPiezo Actuators PICMA
® Chip actuators aresmall monolithic multilayerpiezo actuators. Providing sub-nanometer resolution and sub-
millisecond response, they are
ideally suited to high-level
dynamic applications. PICMA
® actuators are madefrom a ceramic material inwhich the
piezoceramic prop-erties such as stiffness, capaci-
tance, displacement, tempera-
ture stability and lifetime are
optimally combined. The
monolithic, ceramic-encapsu-
lated design provides betterhumidity protection than poly-mer-film insulation. Long Lifetime and HighPerformance—Ideal for
Dynamic Operation PICMA
® actuators consist of a highly
reliable ceramic-encapsulatedPZT block with solderable ter-minations, and come in stan-
dard sizes as small as 2 x 2 x 2 mm.
® Chip actuators aresuperior to conventional actua-
tors in high-endurance situa-tions, where they show sub-
stantially longer lifetimes both
in static and dynamic opera-
tion, even in harsh environ-ments. Due to their high reso-nant frequency, these actua-
tors are ideally suited for
dynamic operation with light
loads; an external preload is
recommended for dynamic
operation with larger loads.
The high Curie temperature of320 °C provides a usable tem-perature range extending up to
150 °C, well above the 80 °C
limit of conventional multilayer
actuators. At the low end, ope-
ration down to a few Kelvin is
possible (with reduction in per-formance specifications).
Dimensions in mm. Application Examples Static and dynamic
nanopositioning
Technical Data / Product Order Numbers Laser tuning
Order Dimensions Displacement Blocking Electrical Resonant Micro-dispensing
number*A x B x TH [µm @ 100 V]force capacitancefrequency in mm±20%[N][nF] ±20%[kHz] Interferometry
PL022.302 x 2 x 22.2> 12025> 300 PL033.303 x 3 x 22.2> 30050> 300
PL055.305 x 5 x 22.2> 500250> 300 Life sciences Photonics
* For optional wire leads change order number extension to .x1 (e.g. PL022.31)Resonant frequency measured at 1 V © PI 1998–2006. Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/10/30.0 pp , capacitance measured at 1 V pp , 1 kHz.
Recommended preload for dynamic operation 15 to 30 MPaMax. operating voltage: -20 to +100 V
Max. operating temperature: 150°C Standard Mechanical Interface: ceramic (top & bottom)Standard Electrical Interface: solderable termination
Available Options: special mechanical interfaces, etc.
Other specifications on request. 13