PICA

TM

-Shear Actuators (X, XY and XYZ)

Special Features

â–  Low Operating Voltage â–  Special Polymer Insulation â–  100% UHV Compatible â–  Sub-nm Resolution â–  Sub-ms Response Time

Piezo Piezo · · Nano Nano · · Positioning Positioning

Applications

â–  NanoPositioning â–  Piezo-Motors â–  SemiconductorEquipment â–  Laser Applications
see PICA TM Shear Actuatorsdatasheet, page 22 Technical Data Cross section3x3 to 16x16 mm 2 Displacement up to 10 µmOperating voltagetyp ±250 V Operating temperature-40 to +150 °C (cryogenic on request) 11