PICMA

®

Monolithic Multilayer Actuators

Special Features

â–  Low Operating Voltage â–  No Polymer Coating â–  Ceramic Insulation â–  100% Ultra-High VacuumCompatible â–  Sub-nm Resolution â–  Sub-ms Response Time

Applications

â–  NanoPositioning â–  Precision Mechanics â–  SemiconductorEquipment â–  Valves â–  Laser Applications â–  Telecommunication
see PICMA ® datasheets pages 13, 14, 15 Technical Data Cross section2x2 to 10x10 mm 2 Displacement up to 40 µm / single stackBlocking force up to 5 kN PICMA ® Monolithic Actuators are the only ceramic insulated piezo actuatorsavailable. They provide higher reliability than other monolithic actuators and exhibitno measurable outgassing Operating voltagemax. 120 V Operating temperature- 40 to +150 °C © PI 1998–2006. Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/10/30.0 10