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| | | Piezo • Nano • Positioning | | |
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| | | Accessories Extension cables & connectors: see page 6-56 in the "Piezo Drivers & Nanopo-sitioning Controllers" section. Notes See page 6-8 in the "Piezo Drivers & Nanopositioning Controllers" section for our comprehensive line of low-noise modular and OEM control electronics for computer and manual control. | | |
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| | | Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo-electrics in Positioning Piezo Drivers & Nano-positioning Controllers Hexapods/ Micropositioning Photonics Alignment Solutions Index | | |
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| | | P-170 - P-178 dimensions (in mm). See table for length, L | | |
| | | P-170 - P-178 with P-700.xx Options, dimensions (in mm). See table for length, L | | |
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| | | P-178.10 | | P-178.20 | | P-178.30 | | P-178.50 | | Units | | Notes see page 1-46 | | |
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| | | | | | | | | | | | | 10 | 20 | 40 | 80 | Mm ±20% | A4 | | | | - | 20 | 40 | 80 | Mm | A6 | | | | - | * SGS | * SGS | * SGS | | B | | | | - / 0.1 | 0.4* / 0.2 | 0.8* / 0.4 | 1.6* / 0.8 | nm | C2 | | | | 180 | 90 | 45 | 22 | N/Mm ±20% | D1 | | | | 2000/ 50 | 2000 / 50 | 2000 / 50 | 2000 / 50 | N | D3 | | | | 0.5 | 0.5 | 0.5 | 0.5 | Nm | D6 | | | | -1000 | -1000 | -1000 | -1000 | V | A7 | | | | 50 | 95 | 180 | 340 | nF ±20% | F1 | | | | 6 | 6 | 6 | 6 | MA/ (Hz x Mm) | F2 | | | | 17 | 14 | 9 | 6 | kHz ±20% | G2 | | | | -40 to +80 | -40 to +80 | -40 to +80 | -40 to +80 | °C | H2 | | | | VH | VH | VH | VH | | J1 | | | | - | L | L | L | | J2 | | | | 19 | 26 | 40 | 65 | g ±5% | K | | | | Al / S | Al / S | Al / S | Al / S | | L | | | | 14 | 22 | 38 | 68 | mm ±0.5 | | | | | B, I, J | B, I, J | B, I, J | B, I, J | | | | | | | | | | | | | | | |
| | | * Closed-loop models can attain linearity to 0.2 %. They require the P-177.10 option (strain gauge sensor) and are supplied with calibration data sheets. ** Resolution of piezo actuators is not limited by friction or stiction. Noise equivalent motion with E-507 amplifier. *** Dynamic small-signal stiffness ~50% higher. | | |
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