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| | | Piezo • Nano • Positioning | | |
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| | | Response of a P-841.10 to a 3 nm peak-to-peak square wave control input signal, measured with servo-control bandwidth set to 240 Hz and 2 msec settling time. Note the crisp response to the square wave control signal. | | |
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| | | Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo-electrics in Positioning Piezo Drivers & Nano-positioning Controllers Hexapods/ Micropositioning Photonics Alignment Solutions Index | | |
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| | | Factory Installed Options P-703.20 High-Vacuum Option (see p. 1-44) P-840.95 Ball Tip (see page 1-44) Accessories P-176.20 Magnetic adapter with M3 threaded stud, see page 1-45. Extension cables & industrial connectors: see page 6-55 in the "Piezo Drivers & Nanopositioning Controllers" section. | | Notes See the "Piezo Drivers & Nanopositioning Controllers" section for our comprehensive line of low-noise modular and OEM control electronics for computer and manual control. | | |
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| | | P-840, P-841, dimensions (in mm). See table for length, L | | |
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| | | | | | | | | | | | | | Open-Loop | | | | | | | | | | P-840.10 | P-840.20 | P-840.30 | P-840.40 | P-840.60 | Units | Notes see | | | | | | | | | | page 1-46 | | | | 15 | 30 | 45 | 60 | 90 | ±20% | A2 | | | | - | - | - | - | - | Mm | A5 | | | | - | - | - | - | - | | B | | | | - / 0.15 | - / 0.3 | - / 0.45 | - / 0.6 | - / 0.9 | nm | C1 | | | | 57 | 27 | 19 | 15 | 10 | N/Mm ±20% | D1 | | | | 1000 / 50 | 1000 / 50 | 1000 / 50 | 1000 / 50 | 1000 / 50 | N | D3 | | | | 0.35 | 0.35 | 0.35 | 0.35 | 0.35 | Nm | D6 | | | | 1.5 | 3.0 | 4.5 | 6.0 | 9.0 | MF ±20% | F1 | | | | 12.5 | 12.5 | 12.5 | 12.5 | 12.5 | MA/ (Hz x Mm) | F2 | | | | 18 | 14 | 10 | 8.5 | 6 | kHz ±20% | G2 | | | | -20 to +80 | -20 to +80 | -20 to +80 | -20 to +80 | -20 to +80 | °C | H2 | | | | VL | VL | VL | VL | VL | | J1 | | | | - | - | - | - | - | | J2 | | | | 20 | 28 | 46 | 54 | 62 | g ±5% | K | | | | N-S | N-S | N-S | N-S | N-S | | L | | | | 32 | 50 | 68 | 86 | 122 | mm ±0.3 | | | | | C,G | C,G | C,G | C,G | C,G | | | | | | | | | | | | | | | | |
| | | * Closed-loop models can attain linearity up to 0.15% and are shipped with performance reports. ** Resolution of piezo actuators is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier; *** Dynamic small-signal stiffness ~30% higher. | | |
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