Piezo

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Nano

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Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion controllers Ceramic Linear motors & Stages Index
P-810 dimensions in mm. Two 0.1 m long teflon insulated pigtails. Length L: see table. Max. torque at top piece: 0.08 Nm. P-830 dimensions in mm. Two 0.1 m long teflon insulated pigtails. Length L: see table. Max. torque at top piece: 0.2 Nm.

Technical Data and Product Order Numbers

OrderTravel Resolution*** StaticPush- /Electrical Dynamic operating ResonantWeight Length L numberrange for[nm]large-signalpull forcecapacitancecurrent coefficientfrequency[g] ±5%[mm] ±0,30 to 100 Vstiffnesscapacity [µF] ±20%[µA / (Hz x µm)](unloaded) [µm] ±20%[N/µm] ±20%[N][kHz] ±20% P-810.10150.151450 / 10.3322420 P-810.20300.3750 / 10.7315638P-810.30450.45450 / 11312856 P-830.10150.15571000 / 51.512.5231022 P-830.20300.3271000 / 5312.5141640 P-830.30450.45191000 / 54.512.5102158P-830.40600.6151000 / 5612.58.52776 Notes seeA2C1D1D3F1F2G2K page 1-46
* Resolution of piezo actuators is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier. ** Dynamic small-signal stiffness ~30% higher. Operating temperature range: -20 to 120 °C. Case: non-magnetic steel; end pieces: stainless steel.Recommended preload for dynamic operation: 10 - 20 MPa.

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