Piezo

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Nano

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Positioning

P_28 6 _2 8 8 _2 8 9 Piezo Industrial actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Industrial position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion controllers Ceramic Linear motors & Stages Index
P-286.xx dimensions (in mm) P-289 dimensions (in mm)

Technical Data

ModelsP-286.xxP-288.00P-289.xxUnitsNotes see page 1-46 Open-loop travel @ 0 to -750 V (P-288),10050200µm ±20%A4 0 to -1000 V (P-286, P-289) * Open-loop resolution 1.00.52.0nmC2**Static large-signal stiffness0.30.20.15N/µm ±20%D1 Push/pull force capacity20 / 1010 / 520 / 10ND3 Torque limit (at tip)0.0030.0030.003NmD6 Max. operating voltage -1000-750-1000VA7 Electrical capacitance 659130nF ±20%F1 Dynamic operating current coefficient (DOCC)0.50.250.5µA/(Hz x µm)F2Unloaded resonant frequency (f
)2.521.1kHz ±20%G2 Standard operating temperature range-40 to +80-40 to +80-40 to +80°CVoltage connection see ordering see ordering see ordering J1 informationinformationinformation Weight 42856g ±5%KMaterial case / end piecesN-SbrassN-SL
* Resolution of piezo actuatorsis not limited by friction or stiction. Noise equivalent motion with E-507 amplifier** Dynamic small-signal stiff-ness ~50% higher Recommended amplifier/controller B, IB, IB, I (codes explained see page 1-3)

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