Catalogue Piezo Actuators
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Piezo • Nano • Positioning
Useful Equations
Axial contraction and radial displacement of piezo tube actuators can be estimated by the following equations:
tial contraction; it can be esti­mated by the following equa­tion:
(Equation 3)
r d
where:
r = tube radius
d31 = strain coefficient (dis­placement normal to polarization direction) [m/V]
U = operating voltage [V] d = wall thickness [m]
The quartered electrodes op­tion makes XY scanning possi­ble. These industrial scanner tubes, which flex in X and Y, are wide­ly used in scanning-probe microscopes manufacturer. The scan range of these components is esti­mated by:
Piezo Actuators
OD+0,05
Nanopositioning & Scanning Systems
Active Optics / Steering Mirrors
Tutorial: Piezo-electrics in Positioning
Capacitive Position sensors
Piezo Drivers & Nano-positioning Controllers
Hexapods/ Micropositioning
Photonics Alignment Solutions
Ceramic Linear motors & Stages
Index
i jp±aofi,,
(Equation 1)
AL « d31- L •
d
where:
= strain coefficient (displa­cement normal to polari­zation direction) [m/V]
= length of the ceramic tube [m]
= operating voltage [V]
= wall thickness [m]
d
31
CM
o
+ 1
L
U
d
(Equation 2)
Ad « • U where:
Ad = change in wall thickness [m]
d33 = strain coefficient (field
and displacement in polarization direction) [m/V]
U = operating voltage [V]
Typical values for d31 and d33 are -200 pm/V and 500 pm/V, respectively.
The radial contraction is the superposition of the increase in wall thickness and the tangen-
PT Tube dimensions, in mm (see table f further information).
(Equation 4)
U = symmetric operating
voltage [V] L = length [m] ID = inner diameter [m] d = wall thickness [m]
2 ■ dai - L2 ID ■ d
U
Ax
where:
Ax = scan range in X and Y (for symmetrical electro­des) [m]
d31 = strain coefficient (dis­placement normal to polarization direction)
[m/V]
Technical Data / Product Order Numbers
Order number
Dimensions L x OD x ID**
Max.
operating voltage [V]
Electrical capacitance [nF ±20%]
Axial
contraction Mm @ max. V
Radial contraction Mm @ max. V
XY
deflection [Mm]
PT120.00
20 x 2.2 x 1.0
500
3
4
n/a
PT130.00
30 x 3.2 x 2.2
500
10
8
0.5
n/a
PT130.90
30 x 3.2 x 2.2
500
12
8
0.6
n/a
PT130.94*
30 x 3.2 x 2.2
±200
4 x 2.4
8
0.6
±6
PT130.10
30 x 6.35 x 5.35
500
18
6
1.0
n/a
PT130.14*
30 x 6.35 x 5.35
±200
4 x 3.8
6
1.0
±8
PT130.20
30 x 10.0 x 9.0
500
36
8
4
n/a
PT130.24*
30 x 10.0 x 9.0
±200
4 x 8.5
8
4
±14
PT130.30
30 x 10.0 x 8.0
1000
18
8
3
n/a
PT130.40
30 x 20.0 x 18.0
1000
35
8
5
n/a
PT140.70
40 x 40.0 x 38.0
1000
70
15
10
n/a
All models available with 40 mm length, except PT120.00 * Quartered electrodes for XY
deflection ** OD, ID ±0.05 mm all models
except PT120 / PT 130.00
(±0.1 mm)
1-27 -
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