Flexibility: PI Ceramic’sStrength All manufacturing processes atPI Ceramic are set up for flexi- bility. Should our standard actuators not fit your applica- tion, let us provide you with a custom design. Our engineers will work with you to find theoptimum solution at a veryattractive price, even for small quantities. Some of our cus- tom capabilities are listed be- low: Amplifiers, Drivers &Controllers The E-507.36 amplifier module(page 6-23) is recommended for operation of PICA™-Shear actuators.

P-111– P-151

PICA™-Shear Piezo Actuators—Compact Multiaxis Motion

PICA-Shear actuators are available in cross-sections from 3 mm x 3 mm to 16 mm x 16 mm. Axis and lead assignment for PICA™-Shear actuators. PICA™-Shear actuator dimensions,in mm. See technical data table forexplanation of A, B, L. Ultra-High Reliability, HighDisplacement, Low Power Requirements Compact Multiaxis Actuators X, XY, XZ and XYZ Versions High Resonant Frequencies Optional Vacuum Versions to 10
-9 9 hPa Extreme Reliability >10 Cycles Non-Magnetic Designs Picometer-Resolution / Sub-Millisecond Settling Time Clear Aperture Optional Ultra-High-Vacuum-Compatible Versions to 10
-9 hPa Custom Endplates (Industrial alumina, Glass, ...) Non-Magnetic and Clear Aperture Versions Extra-Tight Length Tolerances, to 0.02 mm PICA™-Shear series multi-axispiezo actuators are made only by PI Ceramic. These devices are extremely compact and feature sub-namometer resolu- tion and ultra-fast response. They are available in a varietyof geometries providing dis-placements to 10 µm. High Stiffness under HighDuty Cycles Optical Surface Quality Custom Geometries PICA™-Shear actuators exhibithigh stiffness, both parallel and perpendicular to themotion direction. Based on thepiezoelectric shear effect,PICA™-Shear X and XY actua- tors show almost twice the dis- placement amplitudes of con- ventional piezo actuators at the same electric field. Conse- quently they can be madesmaller and have higher reso-nant frequencies. This results in reduced power require- ments for a given induced dis- placement in dynamic X- and Y-axis operation. Custom Displacement Custom Load / Force Ranges Low-Temperature Designs, Down to Liquid-He Short Leadtime for Standard& Custom Designs Combination with Piezoelectric Shear Sensors (no Pyroelectric Effect) Because all piezoelectric mate-rials used in PICA™ actuatorsare manufactured at PICeramic, leadtimes are short and quality is outstanding. All standard and custom PICA™ actuators are delivered with performance test sheets.
Application Examples

Nanopositioning Precision mechanics

PICA™ actuators are specifically

Active vibration cancellation

designed for high-duty-cycle applications. All materials used are specifically matched for robustness and lifetime. En-durance tests proved con-sistent performance even after billions (1,000,000,000) of cyc- les. The combination of high displacement and low electri- cal capacitance provides for excellent dynamic behaviorwith reduced driving powerrequirements.

Semiconductor manufacturing and testing Laser tuning Atomic force microscopy Switching Scanning applications Linear motors

© PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 1-24