Piezo • Nano • Positioning

Groundbreaking Technologies from PI

Capacitive Displacement sensors PILine
® Ultrasonic Piezomotors PICMA
® Piezoelectric actuators NEXLINE
® Nano Drive Technology Based on a new ultrasonicceramic drive, they are light, compact, self-locking, vacuum compatible and have a number of other advantages over clas- sical linear motors. Non-contact and absolute-measuring, with subnanometer resolution, excellent linearityand high bandwidth. Ideallysuited for parallel metrology configurations. Monolithic multilayer piezoactuators with ceramic encap- sulation. Insensitive to atmos- pheric humidity, longer lifetime and wider operating tempera- ture range than conventional multilayer piezo actuators. Ideal for vacuum operation. Addresses the drawbacks of Single and dual existing nanopositioning drives.Provides long travel, subnano- meter resolution and very high forces. Non-magnetic, UV- and vacuum compatible. industrial electrode designs. Dynamic Digital Linearization Reduces phase shifts and track-ing errors of piezo nanoposi- tioning systems used in fast scanning applications. Im- proves dynamic linearity by up to 1000-fold. Active Trajectory Control Compensates crosstalk andguidance errors achieving ac- curacies in the subnanometer and submicroradian range. Parallel Kinematics /Hexapods Parallel Metrology Design Allows design of compact, stiffmicro- and nanopositioning stages with minimal inertia for fastest possible response; no cumulative guiding error and no moving cables. Permits better multi-axis accu-racy by keeping all motion on all controlled axes inside the servo-loop. Parallel metrology is a requirement for active tra- jectory control. InputShaping
® Piezo Controllers Stops self-excited vibrationsinside or outside the servo-loop before they start. Achieves fastest possible settling—usu- ally within one period of the resonant frequency.
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