Catalogue PI 2006 / 2007 Supplement Catalog Information about the latest PI Nanomeasuring, Nanopositioning & Micropositioning products.
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E-S52
500 um, depending on the nominal measurement range of the selected sensor. The E-852.10 provides different extended measuring ranges for each selected sensor.
Easy Sensor Installation
The simple installation of the single-electrode PISeca™ probes is facilitated by the E-852's LED-bar indicating the optimum gap between probe and target.
Factory Calibration for Improved Linearity
Highest possible linearity and accuracy are achieved with fac­tory calibration of the sensor probe together with the signal conditioner electronics. Two measurement ranges can be calibrated at the same time for one particular sensor probe. Factory calibration also opti­mizes parameters like ILS (lin­earization), gain and offset and eliminates cable capacitance influences.
Integrated Linearization System (ILS) for Highest Accuracy
A proprietary linearization cir­cuit compensates the influ­ences of parallelism errors between sensor and target and
Ordering Information
E-852.10
PISeca™ Signal Conditioner Electronics for Single Electrode Capacitive Sensors, 1 Channel (with E-852.PS Power Supply)
Ask about custom designs!
guarantees an excellent meas­uring linearity (to 0.1%).
Multichannel Measurements
PISeca™ sensor electronics are equipped with I/O lines for the synchronization of multiple sensor systems.
|E-852 signal conditioner electronics with PISeca™ capacitive sensor probes D-510.100, D-510.050, D-510.020 (from left)
■ Cost-Effective System Solution for PISeca™ Capacitive Position sensor manufacturer Probes
■ Special Linearization System (ILS) for Maximum Linearity
■ Bandwidth Adjustable from 10 Hz to 6.6 kHz
■ Multiple Measurement Ranges per Probe
■ LED-Bar Measuring-Range Display for Easy Setup & Sensor Installation
■ External Synchronization for Multi-Channel Applications
The economical E-852.10 signal conditioner electronics is spe­cially designed for the PISeca™ D-510 series of single-electrode capacitive position sensor probes. It provides analog out­put with very high linearity, exceptional long-term-stability, sub-nanometer position reso­lution and bandwidths up to 6.6 kHz.
Measurement Principle of Capacitive Sensors
Single-electrode capacitive (ca­pacitance) sensors are direct
metrology devices. They use an electric field to measure change of capacitance between the probe and a conductive tar­get surface, without physical contact. This makes them free of friction and hysteresis and provides high phase fidelity and bandwidth.
Selectable Bandwidth and Measurement Range
The selectable bandwidth set­ting allows the user to adapt the system to different applica­tions. For the highest accuracy and sub-nanometer resolution, the bandwidth can be limited to
10 Hz.
For high-dynamics measure­ments, a bandwidth up to 6.6 kHz is possible, with a reso­lution still down to the 1-nm range.
The user can choose a meas­urement range from 20 to
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Application Examples
■ Semiconductor technology/ test & measurement
■ Data storage
■ Automotive industry
■ Metrology
■ Precision machining
Output linearity error of E-852 signal conditioner / D-510.050 sensor combination (nominal measurement range)
5a-4
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