Piezo

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Nano

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Positioning Technical Data

ModelsP-732.ZCUnitsNotes (see page 2-84) Active axesZ Min. open-loop travel -20 to 120 V15µmA2Closed-loop travel12µmA5 Integrated feedback sensorcapacitiveB * Closed-loop / open-loop resolution0.1 / 0.1nmC1 Closed-loop linearity (typ.)0.03% Tilt (
X ,
Y ) (typ.)<10µradD3 Maximal load20ND4Electrical capacitance5.4µF ±20%F1 ** Dynamic Operating Current Coefficient (DOCC)56µA/(Hz x µm)F2 Resonant frequency unloaded1500Hz ±20%G2 Resonant frequency with 500 g load680Hz ±20%G3 Operating temperature-20 to 80°CH2 Voltage connectionVLJ1 Sensor connection2xCJ2 Body materialAl Recommended driver / controller (codes explained p. see page 6-11)H, F, L
* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. The value given is noise equivalent motion with E-503 amplifier.** Dynamic Operating Current Coefficient in µA per Hz and µm.

2a-8