Superior Lifetime Reliability is assured by the useof award-winning PICMA
P-612.Z
Compact Piezo Elevation Stage with Aperture
XY Multi-Axis Versions
Ordering Information P-612 piezo nanopositionersare also available as XY scan-
ners (see page 2-58) using the
same form factor as the Z-ver-
sions.
P-612.Z0L Vertical Nanopositioning System,
100 µm, 20 x 20 mm Aperture,
Open-Loop P-612.ZSL Vertical Nanopositioning System,
100 µm, 20 x 20 mm Aperture, SGS Sensors ® mul-tilayer piezo actuators, which
are integrated into a sophisti-
cated, single-module, flexure
guiding system. PICMA
Compact P-612.ZSL nano-elevation stage with a 20 mm x 20 mm clear aperture. ® actua-tors are the only actuators on
the market with ceramic-only
insulation, making them far
superior to conventional actua-
tors in lifetime and perform-
ance. The FEA-modeled flex-
ures are wire-EDM-cut for
superior guiding precision. Inaddition they are maintenance-
free and not subject to wear. Small Footprint: 60 x 60 mm 100 µm Travel Range Resolution to 0.2 nm For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA
® High-Performance Piezo Actuators Open-Loop and Closed-LoopVersions These elevation stages arecost-effective, compact, piezo-
based
positioning systems
with travel ranges of 100 µm.
The space-saving design fea-
tures a footprint of only 60 x 60 mm. The 20 x 20 mm
clear aperture makes them ide-
ally suited for sample position-
ing in
microscopy. Thanks to
PICMA Open- and closed-loop modelsare available to suit your appli-
cation. The closed-loop ver-
sions are equipped with high-
resolution,
strain gauge sen-
sors mounted on the flexure
guiding system for optimum
position stability and respon-
siveness. The sensors are
operated in a full bridge circuit
and provide position informa-
tion with nanometer resolution
to the servo-controller.The open-loop models areideal for applications where
fast response and very high
resolution are essential, but
absolute positioning is unim-
portant. They can also be used
when the position is controlledby another source, such as an
external
position sensor manufacturer or a
CCD-chip connected to an
image processing system.
Settling takes less than 10 ms over the entire travel range in closed-loop. ® piezo actuator drivesand frictionless flexure guid-
ance, they provide response
times of a few milliseconds
and resolutions in the nanome-ter range.
Application Examples Interferometry Microscopy Nanopositioning Biotechnology
P-612 are available as XY-scanners (P-612.2SL, on the left) and vertical stages (P-612.ZSL, on the right) providing a travel range of 100 µm per axis. Quality assurance
© PI 1998-2006.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. R2 06/01/03.0 Semiconductor technology
2006 PI News Catalog: Precision Nanopositioning, Piezo Z-Stage, Flexure Actuator, Ultra-Precision Motion control, Translation stage,
2 a-5 , XY-Table, Piezoelectric actuator, Piezomotor, Ulrasonic Motors, n Control, Translation Stage, XY-Table, Piezoelectric Actuator, Piezomotor, Ulrasonic Motors, Piezo Z-Stage,