| | | | | | | | | | | | | | | | | | | Models | F-130.3SD | F-130.3SS | F-130.3OD | F-130.3OS | F-131.3SD | F-131.3SS | F-131.3OD | F-131.3OS | Units | Notes see page 7-96 | | | | Key features | Closed-loop | Stepper | Closed-loop | Stepper | Closed-loop | Stepper | Closed-loop | Stepper | | | | | | | | motors, | DC motors, | motors, | DC motors, | motors, | DC motors, | motors, | | | | | | | closed-loop | closed-loop | open-loop | open-loop | closed-loop | closed-loop | open-loop | open-loop | | | | | | | PZT drives | PZT drives | PZT drives | PZT drives | PZT drives | PZT drives | PZT drives | PZT drives | | | | | | Active axes | X,Y, Z | X,Y, Z | X,Y, Z | X,Y, Z | X,Y, Z | X,Y, Z | X,Y, Z | X,Y, Z | | | | | | Motorized | 5 | 5 | 5 | 5 | 15 | 15 | 15 | 15 | mm | | | | | travel range (XYZ) | | | | | | | | | | | | | | Piezo travel | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | |jm | | | | | range (XYZ) | | | | | | | | | | | | | | Design | 0.007 | 0.006 | 0.007 | 0.006 | 0.007 | 0.006 | 0.007 | 0.006 | |jm | A3 | | | | resolution (motor) | | | | | | | | | | | | | | | | | | | | | | | | | | | Min. incremental | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | |jm | A4 | | | | motion (motor) | | | | | | | | | | | | | | Closed-loop / open- | 2/1 | 2/1 | - / 1 | - / 1 | 2/1 | 2/1 | - / 1 | - / 1 | nm | | | | | loop resolution (PZT) | | | | | | | | | | | | | | | | | | | | | | | | | | | Motorized stage | M-110.3DG | M-110.32S | M-110.3DG | M-110.32S | M-111.3DG | M-111.32S | M-111.3DG | M-111.32S | | see page 7-30 | | | | Piezo drive | P-611.3SF | P-611.3SF | P-611.3OF | P-611.3OF | P-611.3SF | P-611.3SF | P-611.3OF | P-611.3OF | | see page 8-16 | | | | Material | Al / S | Al / S | Al / S | Al / S | Al / S | Al / S | Al / S | Al / S | | L | | | | Recommended con- | C-880 | - | C-880 | - | C-880 | - | C-880 | - | | | | | | troller (see page 9-6) | | | | | | | | | | | | | | | | | | | | | | | | | | | | |