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F-130 · F-131 Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment systems Ordering Information F-130.3SD XYZ Alignment System, 5 mm / 100 µm, Dc motor/Encoder, C/L Piezo F-130.3SS XYZ Alignment System, 5 mm / 100 µm, Stepper motor manufacturer, C/L Piezo F-130.3OD XYZ Alignment System 5 mm / 100 µm, DC Motor/Encoder, O/L Piezo F-130.3OS XYZ Alignment System, 5 mm / 100 µm, Stepper Motor, O/L Piezo F-131.3SD XYZ Alignment System, 15 mm /
100 µm, DC Motor/Encoder, C/L Piezo F-131.3SS XYZ Alignment System, 15 mm /
100 µm, Stepper Motor, C/L Piezo F-131.3OD XYZ Alignment System, 15 mm /
100 µm, DC Motor/Encoder, O/L Piezo F-131.3OS XYZ Alignment System, 15 mm /
100 µm, Stepper Motor, O/L Piezo Ask about custom designs! F-130.3SD XYZ Alignment System, 1nm resolution, with optional F-603.22 ferrule holder (see page 8-26). Up to 15 mm Travel 1 nm Resolution Closed-Loop Piezo Drives Available Stepper- & DC-Motor Drives F-130 are compact computer-controllable XYZ alignmentand positioning systems com-
bining the advantages of ultra-
high-resolution piezo drives
with the long travel range of
motorized stages.They are based on the M-110/M-111 micropositioning stages
(see page 7-36) and the P-611
rapid piezo NanoAlignmentunits (see page 8-16). The F-130/F-131 is available in8 different versions, with step-
per- and DC-motor coarsedrives, and open- and closed-loop piezoelectric fine drives.
(see Ordering Information).The motor drives provide bet-ter than 0.05 µm resolution
over a travel range of 5 and 15 mm. The piezo fine drives
feature a 100 µm travel rangein X, Y and Z, with zero-stic-tion, zero-friction flexure guid-
ing systems and 1 nm resolu-
tion. Several fiber, waveguide andoptics adapters are available
from PI (e.g. model F-603.60, Application Examples Photonics packaging Optical device testing MEMS positioning/alignment Fiber alignment Micromachining Micromanipulation (life sciences) see “Fiber, Objective and Wave- guide Holders”, see page 8-26).The C-880 multi-axis automa-tion platform (see page 9-6) is
recommended as controller. Semiconductor test systems F-131.3xx, dimensions (in mm) © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 8-20
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