Photonics Alignment Solutions - Physik Instrumente - #19

Active axes

X,Y,Z

X,Y,Z

Open-loop travel @ 0 to 100 V

100 / axis

100 / axis

|jm ±20 %

A2

Closed-loop travel

100 / axis

-

|jm

A5

Integrated feedback sensor

SGS

-

B

** Closed-loop / open-loop resolution

2 / 1

- / 1

nm

C1

Stiffness

0.3

0.3

N /Mm ±20 %

D1

Max. (+/-) normal load

1.5

1.5

kg

D4

Electrical capacitance

1.5 / axis

1.5 / axis

uF ±20 %

F1

* Dynamic operating current coefficient (DOCC)

1.7 / axis

1.7 / axis

uA/(Hz x um)

F2

Unloaded resonant frequency (X/Y/Z)

350/220/250

350/220/250

Hz ±20 %

G2

Operating temperature range

- 20 to 80

- 20 to 80

°C

H2

*** Voltage connection

Sub-D-Special

Sub-D-Special

J1

*** Sensor connection

Sub-D-Special

-

J2

Weight (w/o cables)

250

250

g ±5 %

Body material

S/Al

S/Al

L

Recommended Amplifier/Controller

N, C, D ,G , H

N, G, C

(codes explained see page 6-46)

* Dynamic Operating Current Coefficient in uA per hertz and urn. Example: Sinusoidal scan of 50 um at 10 Hz requires approximately 0.8 mA drive current. ** Resolution of PZT NanoPositioners is not limited by stiction or friction. Noise equivalent motion with E-503 amplifier.