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| | | Piezo • Nano • Positioning | | |
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| | | Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo-electrics in Positioning Piezo Drivers & Nano-positioning Controllers Hexapods/ Micropositioning | | |
| | | P-611 NanoCube® in a coarse/fine travel alignment application with M-511, M-501 and M-037 stages. CyberAligner™ software takes data of the complete cross-coupling section, aligns the platform and displays the profile on screen (this process only takes a few seconds). | | |
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| | | Photonics Alignment Solutions | | |
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| | | Index | | |
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| | | Combination of NanoCube® and F-206 Six-Axis Parallel-Kinematics MicroMotion-Robot | | |
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| | | | | | | | | | | | | | | | | | | | | Technical Data | | | | | | | | Models | P-611.3SF | P-611.3OF | Units | Notes see page 2-44 | | | | Active axes | X,Y,Z | X,Y,Z | | | | | | Open-loop travel @ 0 to 100 V | 100 / axis | 100 / axis | |jm ±20 % | A2 | | | | Closed-loop travel | 100 / axis | - | |jm | A5 | | | | Integrated feedback sensor | SGS | - | | B | | | | ** Closed-loop / open-loop resolution | 2 / 1 | - / 1 | nm | C1 | | | | Stiffness | 0.3 | 0.3 | N /Mm ±20 % | D1 | | | | Max. (+/-) normal load | 1.5 | 1.5 | kg | D4 | | | | Electrical capacitance | 1.5 / axis | 1.5 / axis | uF ±20 % | F1 | | | | * Dynamic operating current coefficient (DOCC) | 1.7 / axis | 1.7 / axis | uA/(Hz x um) | F2 | | | | Unloaded resonant frequency (X/Y/Z) | 350/220/250 | 350/220/250 | Hz ±20 % | G2 | | | | Operating temperature range | - 20 to 80 | - 20 to 80 | °C | H2 | | | | *** Voltage connection | Sub-D-Special | Sub-D-Special | | J1 | | | | *** Sensor connection | Sub-D-Special | - | | J2 | | | | Weight (w/o cables) | 250 | 250 | g ±5 % | | | | | Body material | S/Al | S/Al | | L | | | | Recommended Amplifier/Controller | N, C, D ,G , H | N, G, C | | | | | | (codes explained see page 6-46) | | | | | | | | * Dynamic Operating Current Coefficient in uA per hertz and urn. Example: Sinusoidal scan of 50 um at 10 Hz requires approximately 0.8 mA drive current. ** Resolution of PZT NanoPositioners is not limited by stiction or friction. Noise equivalent motion with E-503 amplifier. | | | | | | | | | | | | |
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