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XY stage, Controller, Piezoelectric actuator, Piezo mirror, Capacitive sensor
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Piezo•Nano•PositioningPiezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position SensorsPiezo Drivers & Nano- positioning Controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion Controllers E-610, open-loop frequency response with various PZT loads. Values shown are capacitance in µF, measured in actual PZT. Ceramic Linear Motors & Stages Technical DataIndex ModelsE-610.00, E-610.CO, E-610.LO, E-610.S0 Functionpower amplifier & sensor/position servo-control of PZTs Channels1 Amplifier Maximum output power14 W (see page 6-52) Average output power6 W Peak output current <5 ms140 mAAverage output current >5 ms60 mA Current limitationshort-circuit proofVoltage gain10 ±0.1 Polaritypositive Control input voltage-2 to +12 V Output voltage-20 to 120 V DC-offset setting0 to 100 V at output, with external potentiometer (not included) Input impedance100 k Input/output connector32-pin (male) on rear panel (DIN 41612/D), LEMO voltage socket included Dimensionsone 7T slot wide, 3H highWeight0.35 kg (E-610.00: 0.3 kg) Operating voltage12 to 30 VDC, stabilized Operating current2 A Position Servo-Control (except E-610.00)Sensor Typesstrain gauge (E-610.S0); LVDT (E-610.L0), capacitive (E-610.C0) Servo CharacteristicsP-I (analog) + notch filter Sensor SocketLEMO ERA.0S.304.CLL (included)6-35 6-35 |