E-509

Sensor & Position Servo control Modules for Piezo-Driven Nanopositioning Systems

Ordering Information

E-509.C1A PZT Sensor & Controller Module, Capacitive Sensor, 1 Channel E-509.C2A PZT Sensor & Controller Module, Capacitive Sensor, 2 Channels E-509.C3A PZT Sensor & Controller Module, Capacitive Sensor, 3 Channels E-509.S1 PZT Sensor & Controller Module, Strain gauge Sensor, 1 Channel E-509.S3 PZT Sensor & Controller Module, Strain Gauge Sensor, 3 Channels E-509.L1 PZT Sensor & Controller Module, LVDT Sensor, 1 Channel E-509.L3 PZT Sensor & Controller Module, LVDT Sensor, 3 Channels Ask about custom designs!
E-509.L3

Position Servo-Control for Piezo-Driven NanopositioningSystems Improves Linearity Eliminates Drift & Hysteresis For Capacitive sensors, Strain Gauge Sensors & LVDT Sensors Increases Piezo Stiffness Notch Filter for Improved Dynamics The E-509 is a displacementsensor module with an inte- grated position servo-con- troller for closed-loop PZT posi- tioning systems. Versions forthree different sensor types areavailable: strain gauge sensors, LVDT (linear variable differen- tial transformers) and capaci- tive sensors. For strain gauge and LVDT sensors, 1- and 3-channel modules are available.The capacitive sensor module is available in a 1-, 2-, or 3- channel version. The position servo-control por- tion of the E-509 is identical for all versions, consisting of ananalog P-I (proportional, inte-gral) controller. Proportional and integral gain can be set internally with trimmers. Sensor bandwidth and control bandwidth can also be set. Anotch filter allows operation ofthe piezo positioning system closer to its mechanical reso- nant frequency. The E-509 compensates for thedrift and hysteresis of PZT actu-ators. It also increases the vir- tual stiffness of a PZT by quick- ly adjusting the operating volt- age on the PZT as soon as a change in force or load occurs.

Technical Data

ModelsE-509.C1A, E-509.C2A, E-509.C3A, E-509.L1, E-509.L3, E-509.S1, E-509.S3 FunctionDisplacement sensor electronics and position servo-controller for PZTs ChannelsÏ1 (E-509.x1), 2 (E-509.C2A), 3 (E-509.x3)Sensor typesStrain gauges (E-509.Sx), LVDTs (E-509.Lx), capacitive sensors (E-509.CxA) Servo characteristicsP-I (analog) + notch filter Rear connector32-pin connector, DIN 41612 Sensor socketLEMO ERA.0S.304.CLL (E-509.CxA: LEMO EPL.00.250.NTD) Sensor monitor output socketLEMO 6 pin FGG.0B.306.CLAD56 (E-509.C3A); BNC (1- & 2-channel versions)ERA.05.303.CLL (E-509.S3, E-509.L3) DimensionsOne 7 T slot wide, 3 H highWeight0.35 kg (E-509.x3); 0.25 kg (E-509.x2); 0.2 kg (E-509.x1)
© PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 Operating voltageRequires E-530/E-531 power supply (E-500/E-501 system, etc.)

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