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XY stage, Controller, Positioning stage, Piezoelectric stage, Nano-positioning stage
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Piezo•Nano•PositioningNanopositioning Controllers - 13949 E-500 – E-501System ConfigurationE-500, 19” Chassis Models E-501, 9.5” Chassis Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in PositioningE-500 chassis with the following optionalmodules: E-503 LVPZT amplifier, three E-509piezo servo-controllers (E-509.S1: straingauge; E-509.L1: LVDT; E-509.C1A: capaciti-ve sensor) and E-516.i3 20-bit DAC interface/display. Capacitive Position Sensors Piezo Drivers & Nano- positioning Controllers Hexapods / Micropositioning Contr.Amplifier Contr. Amplifier Contr. Amplifier Display/Slot 3Slot 3Slot 2Slot 2Slot 1Slot 1Interface Slot Photonics Alignment Solutions Installable Amplifier Modules E-503.00 (LV, 3 ch) / E-503.00S* Motion Controllers E-505.00 (LV, 1 ch) / E-505.00S* Ceramic Linear Motors & Stages E-507.XX (HV, 1 ch) Index Installable Sensor & Position Servo-Control Modules E-509.C1A (Capacitive, 1 ch) E-509.L1 (LVDT, 1 ch) E-509.S1 (SGS, 1 ch) E-509.C2A (Capacitive, 2 ch) E-509.C3A (Capacitive, 3 ch) E-509.L3 (LVDT, 3 ch) E-509.S3 (SGS, 3 ch) Installable Display/Interface Modules E-515 (1 / 3 ch) E-516 (1 / 3 ch) Minimal Configuration, PZT Amplifier Function only Extended Configuration, PZT Amplifier with additional Position Servo-Controller Extended Configuration, PZT Amplifier with additional Display (and interface, no Servo-Controller) Extended Configuration, PZT Amplifier with additional Servo-Controller and Display (and interface) Can be installed in E-500 Can be installed in E-501 or E-500 HV: High Voltage LV: Low Voltage * For differential tip/tilt systems with one fixed voltage of +100 V. © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 6-19 6-19 |