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Signal Paths to 15 Meters A remote sensor interface boxis now available for applica-tions where the distance be-tween the mechanics and elec- tronics is greater than 10 m. This DST option (digital sen- sor-signal transmission), inclu- des a compatible E-710 con- troller. It is designed to reducethe interference that begins todegrade performance when the analog sensor excitation and readout signal paths exceed 10 m. The connection between the sensor box and Two Notch Filters

Nanopositioning Controllers - 13949 E-710

All E-710 controllers now havetwo notch filters as standard. The notch filters are anchored in firmware and are active onlyin servo-on mode. Their func-tion is to damp out the me- chanical resonances and im- prove the dynamics of the po- sitioning system. Three Linearization Systems In order to achieve the highestdegree of linearity over the en-tire travel range, the E-710 uses a number of innovative techni-ques: A hardware-based sys- tem in the sensor-processingelectronics known as ILS(Integrated Linearization Sys- tem); a firmware-based system designed to linearize the entire electronics and mechanics sec- tions; and an additional system(standard on 6-channel ver-sions), implementing Dynamic Digital Linearization (see p. 6-16).

Multi-Channel Digital Piezo Controllers with Dynamic Linearization

Active Trajectory Control, Enhanced Multi-Axis Accuracy E-710s have a number ofadvantages over conventional piezo controllers: Sensor andactuator axes need not beparallel to each other, or to the orthogonal logical axes used to command the system. For instance, rotation can be added to XY-motion, or tilt errors can be reduced. The flexible coor- dinate transformation algo- rithm permits operation ofcomplex, multi-axis, parallelmetrology stages, such as the P-587 with 6 degrees of free- dom (p. 2-82).With parallel motion metrolo-gy, the controller monitors allcontrolled degrees of freedom relative to “ground” (the fixed frame) and uses each actuator to compensate the undesired off-axis motion of the others automatically (active trajectorycontrol). High-end nanoposi-tioning systems with active tra- jectory control can attain motion accuracies in the sub- nanometer range.Examples of stages with paral-lel kinematics and parallel metrology are the low-profile P-541 XY-stages, PIMars P-560 series, P-527, high-speed P-733 and 6DOF P-587 series in the “Nanopositioning andScanning Systems” section.
Ordering Information See “Ordering Information / Option Matrix” on next pageOptions and AccessoriesE-710.SCN Firmware with Dynamic Digital Linearization (DDL) E-710.1x3 Sub-D-Piezo Mechanics Extension Cable for E-750 / E-710 controllers, 1 Channel, 3 m E-710.3x3 Sub-D Piezo Mechanics Extension Cable / E-710.3CD Controller, 3 m E-710.3x5 Sub-D Piezo Mechanics Extension Cable / E-710.3CD Controller, 5 m E-710.3x6 Sub-D Piezo Mechanics Extension Cable / E-710.3CD Controller, 6.2 m Ask about custom designs! For Piezo Nanopositioners with Capacitive Feedback Sensors 3-, 4- & 6-Channel Versions 32-Bit Digital Filters Hardware and Firmware Linearization Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity ID Chip Support for Automatic Calibration Optional High-Speed Parallel I/O or DSP Interface Optional Analog Input GCS (General Command Set) Compatible E-710 digital piezo controllersare the most advanced and flexible controllers for piezo nanopositioning and scanningstages on the market. Based onpowerful 32-bit DSPs (digital signal processor) they include integrated, low-noise power amplifiers for piezo actuators and excitation/read-out electro- nics for extremely high-resolu-tion capacitive position sensors. E-710s provide up to 8 piezo driver channels, 7 sensor chan- nels and the processing power for coordinated control of up to6 logical axes, making themsuperior to controllers based on a number of individual, inde- pendent single-axis modules. the controller can be up to 15 m (for bigger distance pleaserequest), as the digital signalsit carries are far more robust.
E-710 data acquisition and analysis functions (Bode plots, etc.) help optimizeperformance of nanopositioning systems in any application E-710.6CD 6-axis Digital Piezo Controller shown with customSuper-Invar 6-DOF piezo flexure nanopositioning stage © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 6-14 6-14