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Extensive Software Support The controller comes with alarge variety of software tools, such as the NanoCapture™ system analysis program, LabView™ drivers and Win-dows Highest Linearity High-Bandwidth AnalogInterface In order to achieve the highestdegree of linearity over the entire travel range, the E-761 uses a number of innovative techniques: A hardware-basedsystem in the sensor-proces-sing electronics known as ILS (Integrated Linearization Sys- tem). In addition, a firmware- based system uses polynomi- al linearization for the entireelectronics and mechanicssections. By this combination the highest possible positio- ning accuracy is ensured.The Wave Generator in the E-761 controller makes possi-ble synchronous motion ofdifferent axes according to user-specified patterns (prede- fined either with mathematical functions, or arbitrarily, stored in internal tables). Flexible Configuration The analog input can be usedas a direct control input. Theapplied voltage is then inter- preted e.g. as target value and can be used to drive one or more axis. It is also possible to use the analog input for trig- gering tasks. E-761 digital piezo controllersand PI nanopositioning stageswith ID-Chip can be operated in any combination, support- ed by the controllers’ Auto- Calibration Function. Indivi- dual stage data and optimizedservo-control parameter arestored in the ID-Chip and are read out automatically by thedigital controllers.

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Nanopositioning Controllers - 13949 E-761

3-Channel Digital Piezo Nanopositioning Controller in PCI-Board Format

Enhanced Multi-AxisAccuracy
Ordering Information E-761.3CD Digital Piezo NanopositioningController, 3 Axis, Sub-D-Special, PCI Board Digital controllers have anumber of advantages over conventional piezo control- lers: Sensor and actuator axesneed not be parallel to eachother, or to the orthogonal logical axes used to command the system. For instance, rota- tion can be added to XY- motion (see the P-527.RCDnanopositioning stage), or tilterrors can be reduced. The fle- xible coordinate transforma- tion algorithm permits opera- tion of complex, multi-axis, parallel metrology stages.With parallel motion metrolo-gy, the controller monitors all controlled degrees of freedom relative to “ground” (the fixed frame) and uses each actuator to compensate the undesiredoff-axis motion of the others automatically (active trajecto-ry control). High-end nanopo-sitioning systems with active trajectory control can attain motion accuracies in the sub- nanometer range.
E-761 Digital Controller in PCI-Board Format. ® For Closed-Loop Piezo Nanopositioning Systems withCapacitive Sensors DLL’s for easy setup,system optimization and inte-gration in application-specific programs. Easy-to-Use Soft- ware / General Command Set (GCS) General Command Set (GCS) is PI’s universal com- mand set for uniform controlof nano- and microposition-ing systems. Most PI nano High-Speed PCI Interface Additional High-Bandwidth Analog Interface 32-Bit Digital Filters 24-Bit DAC Resolution 2 Linearization Systems Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems po-sitioning and micropositioning ID-Chip Support for Automatic Calibration controllers including hexapod systems support this com-mand set. By GCS the control is independent of the used hardware, so that different devices can be controlled together or new devices can be used with minimum pro-gramming expenditure. Theproduction of own application programs becomes clearly simpler owing to GCS, since the commands for all support- ed devices are identical in syn-tax and function. Otherwisenecessary training can be omitted completely. Appli- cation development is acceler- ated by the use of the GCS command set observably, since comfortable high-levelfunctions are used. This de-creases at the same time the error probability. The simple use of the GCS takes place in form of a universal PI- LabView™ driver set (VIs), aWindows Extensive Software Package E-761 digital piezo controllersoffer advanced control tech-nology in a cost-efficient PCI-board format. These control- lers can control piezo-driven nanopositioning systems with up to three logical axis (four integrated piezo amplifiers!). E-761 are based on extremelylow-noise power amplifiers,highly advanced 24-bit digital analog converters (DAC) and powerful 32-bit digital signal processors (DSP).Having PCI-board format theE-761 digital controller can be easily implemented in all cur- rent PCs and industry-PCs, allowing for easy integration with other devices such as frame grabbers. The PCI inter-face with its high bandwidthallows for a very fast commu- nication between software and controller. This is a defini- te plus in time-critical applica- tions or when controllingseveral axis.
® Dynamic LinkLibrary (DLL), or a COM-Object.
© PI 1998-2006.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/04/19.2 6 -11a