Piezo

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Nano

•

Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Industrial position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion controllers Ceramic Linear motors & Stages Index
Dimensions of the P-62x.ZCD/.ZCL/.Z0L in mm,decimal places separated by commas. PIHera ® XYZ combination

Technical Data

ModelsP-620.ZCD P-621.ZCDP-622.ZCD P-62x.ZCLP-62x.Z0LUnits Notes see p. 2-84 Active axesZZZZZ Open-loop travel -20 to 120 V65140400see P-62x.ZCDsee P-62x.ZCDµm A2 Closed-loop travel50100250see P-62x.ZCD- µmA5 Integrated feedback sensorcapacitivecapacitivecapacitivesee P-62x.ZCD- B* Closed-loop / open-loop resolution0.2 / 0.10.3 / 0.21 / 0.5see P-62x.ZCD- / see P-62x.ZCDnmC1 Closed-loop linearity (typ.)0.020.020.02see P-62x.ZCD-% Stiffness0.50.60.24see P-62x.ZCDsee P-62x.ZCDN/µmD1 Push / pull force capacity (in X)10/510/810/8see P-62x.ZCDsee P-62x.ZCDN D3Max. load101010see P-62x.ZCDsee P-62x.ZCDN D4 Lateral force limit101010see P-62x.ZCDsee P-62x.ZCDN D5 Tilt (
X ,
Y ) (typ.)<80<100<200see P-62x.ZCDsee P-62x.ZCDµradE1 Electrical capacitance1.53.06.0see P-62x.ZCDsee P-62x.ZCDµF ±20% F1Dynamic operating3.753.753.0see P-62x.ZCDsee P-62x.ZCDµA/(Hz x µm)F2current coefficent (DOCC) Unloaded resonant frequency1.000790350see P-62x.ZCDsee P-62x.ZCDHz ±20% F2Resonant frequency @ 30 g load690500270see P-62x.ZCDsee P-62x.ZCDHz ±20% G2 Operating temperature range-40 to 120-40 to 120-40 to 120see P-62x.ZCD-40 - 150°C H2Voltage ConnectionDDDVLVLJ1 Sensor ConnectionDDD2 x C- J2 Weight (with cables)170g ±5% L Body materialAlAlAlsee P-62x.ZCDsee P-62x.ZCDRecommended amplifier/controllerF, M, L, HF, M, L, HF, M, L, HF, M, L, HC, G(codes explained p. 2-17)
* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller.

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