P-611.1· P-611.2

Compact X and XY Piezoelectric Nanopositioning Systems

Ordering Information P-611.10 Nanopositioning System 100 µm, Open-Loop P-611.1S Nanopositioning System 100 µm, SGS Sensor P-611.20 XY Flexibility
Nanopositioning System 100 x 100 µm, Open-Loop P-611.2S XY The P-611 family is very flexi-ble because of the variety ofsingle- and multi-axis versions (X, XY, Z, XZ and XYZ) and because all versions can be easily combined with a variety of micropositioning systems to form hybrid systems withlonger travel ranges (see p. 8-20).
Nanopositioning System 100 x 100 µm, SGS Sensor Open- and Closed-LoopModels
Z and XZ Versions see p. 2-38NanoCube Open- and closed-loop ver-sions are available to suit your application. The open-loopmodels are ideal for applica- tions where fast response and very high resolution are essen-tial, but absolute positioning isnot important. They can also be used when the position is controlled by an external linear position sensor such as an interferometer, a PSD or quad cell, CCD chip / image process-ing system, or the eyes andhands of an operator. The closed-loop versions areequipped with high-resolution strain gauge sensors mounted on the flexure guiding system for optimum position stability and responsiveness. The sen- sors are operated in a fullbridge circuit and provide po-sition information with nano- meter resolution to the servo controller.
X and XY nanopositioning systems,100 µm travel range, 1 nm resolution P-611.2S dimensions in mm ® mul-tilayer actuators, which are integrated into a sophisticated, single-module, flexure guiding system. The PICMA
® XYZ Versionsee p. 2-74Ask about custom designs! 100 µm Travel Range
® actuatorsfeature cofired ceramic encap- sulation and thus offer better performance and reliability than conventional piezo actua- tors. The wire-EDM-cut flex-ures are FEA modeled to makethem extremely precise. In addition they are maintenance- free and not subject to wear. Small Footprint: 44 x 44 mm Notes Resolution 1 nm See the “Selection Guide” onp. 2-14 PICMA
® High-Performance Piezo Actuators ff . for comparison with Low Cost other nanopositioning systems. Open- and Closed-Loop Models P-611s are piezo-based nano-positioning systems featuring acompact footprint of only 44 x 44 mm. The X- and XY-ver- sions described here are ideal- ly suited for planar positioning tasks such as optical-path length correction in interfero-metry, sample positioning inmicroscopy or scanning appli- cations. Both versions are available with 100 µm travel range. Equipped with piezo drives and zero-stiction, zero-friction flexure guiding system,the series provides nanometer- range resolution and millisec- ond response time.
Application Examples

Micromachining Sample positioning(microscopy) Micromanipulation (lifesciences) Semiconductor test systems