Piezo

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Nano

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Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position sensors Piezo Drivers & Nano- positioning controllers Hexapods / Micropositioning Photonics Alignment Solutions Motion controllers Ceramic Linear motors & Stages Index

Technical Data

ModelsP-750.00P-750.10P-750.20UnitsNotes see p. 2-84 Active axesXXX Open-loop travel @ 0 to 100 V757575µm ±20%A2 Closed-loop travel-7575µmA5 Integrated feedback sensor-LVDTcapacitiveB* Closed-loop / open-loop resolution - / 110 / 11 / 1nmC1 Closed-loop linearity (typ.)-0.10.03% Full-range repeatability (typ.)-±20±3nmC3 Stiffness 121212N/µm ±20%D1Push/pull force capacity 800 / 100800 / 100800 / 100ND3(in operating direction) Max. (±) normal load100100100ND4Lateral force limit505050ND5 Tilt (
y ,
z ) (typ.)101010µrad E1Lateral runout (Y) (typ.)111nmE2 Electrical capacitance 7.5 7.57.5µF ±20%F1** Dynamic operating current 12.512.512.5µA/(Hz ±µm)F2coefficient (DOCC)
* For calibration informationsee p. 2-8. Resolution of PIpiezo nanopositioners is notlimited by friction or stiction. The value given is noise equivalent motion with E-503 amplifier.** Dynamic Operating CurrentCoefficient in µA per Hz andµm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 3.8 mA drive current. P-750 dimensions (in mm) Unloaded resonant frequency 600600600Hz ±20%G2Resonant frequency @ 1900 g load250250250Hz ±20%G3 Operating temperature range-20 to 80-20 to 80-20 to 80°CH2Voltage connectionVL VLVLJ1 Sensor connection -L2 x CJ2 Weight (with cables)250025502550g ±5% Body materialN-SN-SN-SL Recommended amplifier/controller G, C H, EH, F, L(codes explained p. 2-17)

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