Catalogue Nanopositioning and Piezo Actuators
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Piezo • Nano • Positioning
Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics / Steering Mirrors
Tutorial: Piezo-electrics in Positioning
Capacitive Position sensors
Piezo Drivers & Nano-positioning Controllers
Hexapods/ Micropositioning
Photonics Alignment Solutions
Ceramic Linear motors & Stages
Index
Wire EDM cutting process being used on a P-780 flex­ure NanoPositioner
Technical Data
Models
P-780.00
P-780.20
Units
Notes see p. 2-84
Active axes
X
X
Open-loop travel @ 0 to 100 V
80
80
Um ±20%
A2
Closed-loop travel
-
80
Um
A5
Integrated feedback sensor
-
LVDT
B
* Closed-loop / open-loop resolution
- / 1
5 / 1
nm
C1
Closed-loop linearity (typ.)
-
0.1
%
Full-range repeatability (typ.) Stiffness
1.5
±20
1.5
nm
N/um ±20%
C3 D1
Push/pull force capacity (in operating direction)
50 / 5
50 / 5
N
D3
Max. (±) normal load
10
10
N
D4
Lateral force limit
10
10
N
D5
Lateral runout (X/Y/Z) (typ.)
10
10
nm
E2
Electrical capacitance
** Dynamic operating current
3.0 4.7
3.0 4.7
UF ±20% uA/(Hz x um)
F1 F2
coefficient (DOCC)
Unloaded resonant frequency
1000
1000
Hz ±20%
G2
Resonant frequency @ 100 g load
600
600
Hz ±20%
G3
Operating temperature range
-20 to 80
-20 to 80
°C
H2
Voltage connection
VL
VL
J1
Sensor connection
-
L
J2
Weight (with cables)
150
170
g ±5%
Body material
Recommended amplifier/controller
N-S G, C
N-S
H, E
L
(codes explained p. 2-17)
* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. The value given is noise equivalent motion with E-503 amplifier. ** Dynamic Operating Current Coefficient in uA per Hz and Mm. Example: Sinusoidal scan of 30 um at 10 Hz requires approximately 1.4 mA drive current.
2-33 -
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