P-780

Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology

Ordering Information P-780.00 Miniature Piezo Flexure Stage, 80 µm ® drives are more robustthan conventional piezo actua- tors, featuring superior lifetime and performance in both dynamic and static applica- tions. Because guidance, actuators and sensors are all frictionlessand maintenance-free, thesenanopositioning systems achieve outstanding levels of reliability.
P-780.20 Miniature Piezo Flexure Stage, 80 µm, LVDT Sensor Ask about custom designs! P-780 flexure nanopositioner Notes ff and p. 5-2 See the “Selection Guide” onp. 2-14 Fast Response (1 kHz Resonant Frequency) ff. for more information. ff . for comparison with other nanopositioning systems. Stainless Steel Construction Frictionless Precision Flexure Guiding System Working Principle / Reliability 80 µm Travel Range P-780 nanopositioning stagesare equipped with the award winning PICMA Direct Metrology with LVDT Sensor Resolution <5 nm PICMA
® High-Performance Piezo Drives P-780 piezo-driven, flexure-guided stages are extremely compact and fast devices, pro- viding a positioning and scan- ning range of up to 80 µm with settling times of only a few mil-liseconds. The P-780 is de-signed for applications with loads up to 100 g. Closed-loop and open-loop versions are offered to fit your application. Direct-metrology LVDT sensorP-780.20 models feature direct-measuring, non-contact LVDTsensors (direct metrology). Unlike indirect strain-measur-ing, piezoresistive sensors, direct-metrology sensorsmeasure the actual distancebetween the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and—becauseexternal disturbances are seenby the sensor immediately—a stiffer, faster-responding ser- vo-loop. See p. 2-4
Application Examples

Metrology Nanopositioning Scanning microscopy Disk drive testing Fiber optics Scanning interferometry Biotechnology

® piezo drives,integrated into a sophisticated single-module, flexure guiding system. The wire-EDM-cut flex-ures are FEA modeled for zero stiction, zero friction andexceptional guiding precision.The ceramic-encapsulated PICMA

Micromanipulation