Piezo • Nano • Positioning P-541.ZCD Low Profile Z/Tip/Tilt Piezo Nanopositioning stages for Microscopywith Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-50P-518, P-528, P-558 Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-52
Piezo Actuators Nanopositioning & Scanning Systems More Tip/Tilt Systems, see p. 3-8.2-/3-Axis Stages (Modular / Parallel Kinematics)
Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning P-620.2 – P-625.2 PIHera
® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-54P-713, P-714 Low-Profile OEM XY Piezo-Scanners for Imaging Applications . . . .2-56 P-612 Compact XY Piezo-Nanopositioner with Aperture . . . . . . . . . . . . . . . . . . . .2-58P-541.2SL, P-542.2SL Low-Profile, Parallel-Kinematics XY Piezo ScanningStages for Microscopy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-60P-541.2CD, P-542.2CD Low-Profile, XY Piezo Scanning Microscopy Stageswith Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-62P-733.xDD Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-64P-733 XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-66P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-68P-770 Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-70
Capacitive Position sensors Piezo Drivers & Nano-positioning controllers Hexapods /Micropositioning Photonics Alignment Solutions Industrial motion controllers Ceramic Linear motors & Stages Index 3-Axis Stages (Modular / Parallel Kinematics) P-363 PicoCube
® High-Speed, XY(Z) Piezo stages for Nanotechnology, SPM, AFM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-72P-611 NanoCube
® XYZ Piezo Nanopositioning Systems . . . . . . . . . . . . . . . . . . . .2-74P-615 NanoCube
® XYZ Piezo NanoAlignment Systems with Parallel Metrology . .2-76P-517, P-527 Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-78P-561, P-562, P-563 PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-80 6-Axis Parallel Kinematics Stages P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-82 6-Axis Parallel Kinematics Positioning systems (Hexapods)with Servo motor Drives see p. 7-18 ff. Notes (Technical Data) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-84
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